Lithography Measurement Apparatus Noise Mitigation
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Solution Overview
Problem
In lithography processes for manufacturing articles like semiconductor devices, achieving high position measurement accuracy is hindered by noise in images of measurement targets.
Innovation Solution
A measurement apparatus that captures images of measurement targets and uses statistical techniques to generate multiple image components, which are then processed to determine position information with improved robustness against noise.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional image processing is used to measure position, then the measurement process is simple, but noise in images hinders position measurement accuracy
Solution Approach 1:
The image is segmented into multiple image components through statistical processing of multiple captured images. This segmentation separates the actual measurement target signal from noise components, allowing selective processing of useful information while filtering out harmful noise interference.
Solution Approach 2:
Multiple images captured under identical conditions are combined through statistical techniques to generate image components. By merging multiple measurements, the signal-to-noise ratio is improved, and the robustness against noise is enhanced while maintaining position measurement accuracy.
2Measurement precision
If multiple images are processed to improve accuracy, then position measurement accuracy improves, but processing complexity increases
Solution Approach 1:
The patent replaces complex mechanical or manual image processing methods with statistical computation techniques. By using statistical methods to generate image components from multiple images, the system achieves high measurement accuracy through computational efficiency rather than complex physical processing.
Data Source
AI summary
A measurement apparatus that measures position information of a measurement target is provided. The apparatus includes a scope configured to generate an image by capturing an image of the measurement target, and a processor configured to obtain position information of the measurement target based on the image. The processor is configured to generate a plurality of image components using a statistical technique from a plurality of images generated by the scope, output the plurality of generated image components, perform processing based on the plurality of image components, and determine the position information based on a result of the processing.