Lithography Component Measurement Decoupling for Vibration Isolation

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Solution Overview

Problem

Existing measuring systems for optical components in lithography systems suffer from disruptive vibrations and forces transmitted through cables and hoses, which negatively impact measurement accuracy due to their inherent stiffness exceeding the tuning frequencies of vibration isolator devices.

Innovation Solution

A decoupling device is used to mechanically decouple the measuring system from the supply device, allowing for contactless or minimally contact media transfer, such as data, electrical energy, gas, liquid, and vacuum, by using wireless connections, inductive energy transfer, and labyrinth or gap seals to minimize vibration transmission.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If cables and hoses with inherent stiffness are used to supply the measuring system, then static requirements and mounting safety are ensured, but disruptive vibrations and forces are transmitted to the measuring system, negatively influencing measurement accuracy

Engineering Contradiction:

Improvemounting safetyVSAvoidmeasurement accuracy

Core Design Contradiction:

ReliabilityVSMeasurement precision

Solution Approach 1:

The connection between supply device and measuring system is segmented into multiple flexible connections rather than a single stiff cable. The flexible cable assembly includes multiple segments that can independently absorb vibrations, preventing transmission to the measuring system while maintaining structural integrity and mounting safety.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A flexible cable assembly acts as an intermediary element between the supply device and the measuring system. This intermediary absorbs and isolates vibrations and forces, preventing them from reaching the sensitive measuring system while still allowing necessary supply of power and data.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Strength

If cables and hoses with high cross sections and stiff materials are used, then static requirements are met, but the cables exceed tuning frequencies of vibration isolator devices, transmitting vibrations to the measuring system

Engineering Contradiction:

Improvecable strengthVSAvoidmeasurement accuracy

Core Design Contradiction:

StrengthVSMeasurement precision

Solution Approach 1:

The patent employs flexible cable assemblies with controlled flexibility characteristics. These flexible connections have lower stiffness that allows them to operate below the tuning frequencies of vibration isolator devices, preventing resonance and vibration transmission while maintaining sufficient strength through proper flexible material selection and design.

Inventive Principle:

Principle #30Flexible shells and thin films

3Reliability

If the measuring system is mechanically connected to the supply device, then media transfer is reliable, but vibrations and forces are transmitted during measurement processes

Engineering Contradiction:

Improvemedia transfer reliabilityVSAvoidvibration transmission

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The harmful vibrational characteristics are extracted and isolated from the connection system. The flexible cable assembly is specifically designed to remove stiffness and vibration transmission properties while retaining the essential function of media transfer, effectively separating the useful function from the harmful effect.

Inventive Principle:

Principle #2Taking out (Extraction)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution ensures reliable and accurate measurement of optical components by preventing disruptive vibrations, enabling easier machine part exchange and reducing process time while maintaining measurement accuracy.

Implementation Method 1

at least one vibration isolator device, a measuring system mounted on the at least one vibration isolator device

Methodology Applied

Scientific EffectVibration isolation: Damping

Implementation Method 2

inductive energy transfer

Methodology Applied

Scientific EffectInductive energy transfer: Electromagnetic Induction

Implementation Method 3

labyrinth or gap seals to minimize vibration transmission

Methodology Applied

Scientific EffectLabyrinth seal:

Data Source

PatentUS20260010083A1Device and method for measuring a component, and lithography system

Publication Date: 2026.01.08 CARL ZEISS SMT GMBH

AI summary

An apparatus (1) for measuring a component (2) of a lithography system, having a vibration isolator device (3), a measuring system (4) mounted on the vibration isolator device and a supply device (5) supplying the measuring system via a data connection (6) transferring data between the supply device and the measuring system, a current connection (7) transferring electrical energy between the supply device and the measuring system, a gas connection (8) transferring a gas between the supply device and the measuring system, a liquid connection (9) transferring a liquid between the supply device and the measuring system, and/or a vacuum connection (10) transferring a vacuum between the supply device and the measuring system. A decoupling device (11) mechanically at least partially decouples the measuring system from the supply device at least during the measurement of the component.