Lithography-Based 3D Metal Architectures for Sub-Micron Precision

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Solution Overview

Problem

Current metal additive manufacturing (AM) techniques are limited to 20-50 μm resolution, making it impossible to produce complex 3D-printed metals with smaller features, and there is no established method for printing metals at the micron scale, which hinders the creation of metal structures with sub-micron dimensions.

Innovation Solution

A lithography-based process using a photopolymerizable resist containing metal ions or metalloids, which is then sculpted using two-photon lithography and heat-treated to create 3D nano- and micro-architected materials with features as small as 5-100 nm, allowing for the production of complex metal frameworks and structures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If conventional metal additive manufacturing techniques are used, then manufacturing capability is maintained, but manufacturing precision is limited to 20-50 μm resolution

Engineering Contradiction:
Improvefeature sizeVSAvoidprocess complexity
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent uses a photopolymerizable resist as an intermediary material containing metal ions or metal clusters. This resist is first patterned using two-photon lithography to achieve sub-micron precision, then converted to metal through pyrolysis. The intermediary resist enables high-precision metal structure fabrication that would be impossible with direct metal AM techniques.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent replaces mechanical metal deposition processes with a photopolymerization-based lithography system. Instead of using mechanical or thermal processes to directly manipulate metal particles, the invention uses light-induced polymerization to create precise patterns, followed by chemical conversion to metal, achieving 5-100 nm resolution.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Manufacturing precision

If two-photon lithography with photopolymerizable resist is used, then manufacturing precision reaches 5-100 nm resolution, but device complexity increases

Engineering Contradiction:
Improvefeature sizeVSAvoidprocess steps
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent combines multiple functions into a single photopolymerizable resist material: it serves as the structural template, the metal source (through incorporated metal ions/clusters), and the sacrificial organic component. This merging reduces the need for separate deposition and processing steps for each function.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent utilizes parameter changes during pyrolysis to transform the resist material. By controlling temperature and atmosphere parameters during heating, the organic components are selectively removed while metal ions are converted to metallic structures, enabling precise control over the final metal architecture through thermal parameter management.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method enables the creation of metal structures with features an order of magnitude smaller than existing 3D-capable metal AM methods, achieving high-fidelity and dense sub-micron architectures with enhanced mechanical properties, suitable for applications in microdevices and water purification.

Implementation Method 1

The process uses a photopolymerizable resist containing the framework material

Methodology Applied
Scientific EffectPhotopolymerization: Photopolymerisation

Implementation Method 2

These scaffolds can then be heat treated (e.g., pyrolyzed) to volatilize any organics, thereby leaving the framework material in a desired architectural format

Methodology Applied
Scientific EffectPyrolysis: Pyrolysis

Implementation Method 3

The process uses a photopolymerizable resist containing the framework material. The process uses, for example, a two-photon lithography technique to sculpt 3D polymer scaffolds

Methodology Applied
Scientific EffectTwo-photon lithography: Photopolymerisation

Data Source

PatentUS11442362B2Additive manufacturing of architectured materials
Publication Date: 2022.09.13 CALIFORNIA INST OF TECH
  • US11442362B2 patent drawing
  • US11442362B2 patent drawing
  • US11442362B2 patent drawing

AI summary

This disclosure provides a scalable and reproducible process to create complex 3D metal materials with sub-micron features by applying lithographic methods to transparent metal- or inorganic-rich polymer resins.