Lithography Mirror Stops for Shock Force Distribution
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Solution Overview
Problem
Lithography systems, particularly EUV lithography systems, face challenges in preventing damage to movable components during tremors or shocks, as existing solutions fail to effectively minimize kinetic energy and distribute forces during braking, leading to potential damage from high local forces.
Innovation Solution
The optical arrangement incorporates multiple stop faces to distribute the force over a larger area, uses distance sensors for precise positioning, and employs damping devices like spring elements or fluid dampers to minimize kinetic energy, while also optimizing the design of movable components with lightweight materials and cutouts to reduce mass without compromising stiffness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a single stop face is used to delimit the movement of the movable component, then the structure is simple, but the force is concentrated on a small area causing high local forces and potential damage during shocks or tremors
Solution Approach 1:
The stop is divided into multiple stop faces (at least two) instead of using a single stop face. This segmentation distributes the braking force over a larger total area, reducing local force concentration and preventing damage to the movable component during shocks or tremors.
2Reliability
If the distance between the stop face and the movable component is minimized to reduce kinetic energy, then the protection effectiveness increases, but the risk of vibration transfer from the stop to the component increases
Solution Approach 1:
A damping device is introduced between the stop and the movable component to provide beforehand cushioning. This damping device absorbs vibrations and prevents them from being transferred to the movable component while maintaining a minimal distance for effective kinetic energy reduction during shocks or tremors.
3Stability of the object's composition
If the movable component is made heavier to increase stiffness, then the structural stability improves, but the kinetic energy during shocks increases leading to higher impact forces on the stop
Solution Approach 1:
The movable component is designed using composite materials or optimized material distribution (such as strategic placement of material in specific regions) to achieve high stiffness and structural stability without increasing overall mass. This reduces the kinetic energy and impact force on the stop during shocks while maintaining structural integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces the risk of damage to movable components by minimizing kinetic energy and distributing forces, ensuring precise control and absorption of vibrations, thereby protecting the components from shock and tremors.
Implementation Method 1
at least one damping device for damping a movement of the stop face along a movement direction of the movable component
Implementation Method 2
employs damping devices like spring elements
Data Source
AI summary
An optical arrangement, in particular a lithography system, includes: a movable component, in particular a mirror; at least one actuator for moving the component; and at least one stop having a stop face for delimiting the movement of the component. The optical arrangement further includes, on a stop or on a plurality of stops, at least two stop faces for delimiting the movement of the movable component in one and the same movement direction.