Modular Laser Lithography Carrier with Precision Surfaces

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Existing laser lithography devices face challenges in precision and maintenance due to the complex adjustment of numerous optical and mechanical components, which are affected by temperature drift, mechanical creep, and natural vibrations, leading to difficulties in manufacturing and maintenance.

Innovation Solution

A modular laser lithography device with a module carrier system featuring precision-matched reference and adjustment surfaces on carrier plates and modules, allowing for pre-adjustment and easy exchange of modules without requiring complete re-adjustment of the structure, along with standardized interfaces for independent module development and quality control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If individual components are attached using holders, screws or clamps, then the device can be assembled, but the positional accuracy and adjustment are affected by temperature drift, mechanical creep, and natural vibrations

Engineering Contradiction:
Improvepositional accuracyVSAvoidadjustment complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines multiple individual components into modular component groups that are pre-assembled and pre-adjusted as integrated units. These modular groups are then attached to the device frame as single entities, eliminating the need for adjusting numerous individual components separately and reducing the impact of temperature drift and mechanical creep on overall positioning accuracy.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The device is divided into modular component groups that can be independently assembled and adjusted. Each modular group functions as a discrete unit with its own reference surfaces, allowing for localized adjustment without affecting the entire device. This segmentation reduces the complexity of overall adjustment while maintaining positional accuracy through standardized interfaces.

Inventive Principle:
Principle #1Segmentation

2Adaptability or versatility

If numerous individual components are assembled, then the device achieves complete functionality, but replacing or maintaining individual components necessitates complete readjustment of the entire assembly

Engineering Contradiction:
Improvecomponent replaceabilityVSAvoidmaintenance complexity
Core Design Contradiction:
Adaptability or versatilityVSEase of repair

Solution Approach 1:

The patent merges individual components into integrated modular groups that are pre-adjusted as complete functional units. When maintenance or replacement is needed, the entire modular group can be replaced as a single unit without requiring readjustment of other components, significantly simplifying maintenance while maintaining full device functionality.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The modular component groups are pre-assembled and pre-adjusted to precise specifications before being installed in the final device. This preliminary adjustment work is performed during manufacturing rather than during maintenance, allowing for quick replacement without requiring time-consuming readjustment procedures later.

Inventive Principle:
Principle #10Preliminary action

3Manufacturing precision

If high precision alignment of optical and mechanical components is achieved, then the quality and functionality of structures are improved, but the manufacturing and maintenance become problematic due to sensitivity to environmental factors

Engineering Contradiction:
Improvealignment precisionVSAvoidenvironmental sensitivity
Core Design Contradiction:
Manufacturing precisionVSObject-affected harmful factors

Solution Approach 1:

The patent combines sensitive optical and mechanical components into integrated modular groups with rigid internal structures. These pre-adjusted modules are less susceptible to environmental factors like temperature drift and vibrations because the critical alignments are established within the rigid modular structure rather than across the entire device, reducing the cumulative effect of environmental variations.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentEP3693797B1System for constructing a laser lithography device and module support therefor
Publication Date: 2021.09.29 NANOSCRIBE HLDG GMBH
  • EP3693797B1 patent drawingFigure 1
  • EP3693797B1 patent drawingFigure 2
  • EP3693797B1 patent drawingFigure 3

AI summary

The invention relates to a system (1) for constructing a laser lithography device, comprising a plurality of modules (18) and a module carrier (30) to which the multiple modules (18) can be attached to the module carrier (30); wherein the module carrier (30) comprises a lower support plate (32) and an upper support plate (34) and a spacer (36), wherein the spacer (36) is arranged between the lower support plate (32) and the upper support plate (34) and fixes them in a defined position relative to each other, wherein the lower support plate (32) and the upper support plate (34) are each extended longitudinally along a longitudinal direction (38) and each have at least one reference surface (44) extending along the longitudinal direction (38), and wherein the modules (18) each have a module support plate (62) with an adjustment surface (66), wherein, in order to attach the module (18) to the module carrier (30), the adjustment surface (66) is placed against the reference surface (44).