Lithography Motor Driving Profile for Power and Heat Management
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Solution Overview
Problem
Lithography apparatuses face high power consumption due to the inefficiencies in driving the positioning table, particularly in low-throughput or standby states, as existing technologies prioritize maximum productivity over power management.
Innovation Solution
A lithography apparatus with a motor driving profile that can switch between normal and power-saving modes, adjusting the acceleration and cooling capacity based on throughput to minimize heat generation and power consumption, including control of the cooler and heater to match the production schedule.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the acceleration of the positioning table is increased to increase throughput, then productivity is improved, but the amount of generated heat of the linear motor increases leading to higher power consumption
Solution Approach 1:
The patent applies dynamics by making the driving profile of the linear motor adaptable and changeable based on operational conditions. The controller selects between multiple driving profiles (first profile for high throughput, second profile for low throughput/standby) depending on the required productivity level. This dynamic adjustment allows the system to optimize between throughput and power consumption by matching the motor's acceleration characteristics to the actual production needs, rather than always operating at maximum acceleration.
2Reliability
If the cooling capacity of the cooler is held constant to maintain temperature stability, then temperature control reliability is improved, but electric power is wasted during low throughput or standby states
Solution Approach 1:
The patent applies dynamics by making the cooling capacity adaptable to the operational state. The controller adjusts the cooling capacity based on the selected driving profile and actual heat generation levels. During standby or low throughput operations, the cooling capacity is reduced since less heat is being generated by the linear motor. This dynamic adjustment eliminates the waste of maintaining high cooling capacity when it is not needed, while still ensuring adequate temperature control during high throughput operations.
Solution Approach 2:
The system uses feedback by monitoring the operational state (throughput level, driving profile selection) and adjusting the cooling capacity accordingly. The controller receives information about the current production requirements and modulates the cooling system's power consumption to match the actual thermal load, creating a closed-loop control system that optimizes energy efficiency while maintaining temperature stability.
3Reliability
If the heating amount of the heater is increased to compensate for reduced cooling capacity during standby, then temperature stability is maintained, but power consumption increases
Solution Approach 1:
The patent applies dynamics by making the heating requirement adaptable to the operational state. When the driving profile is changed to reduce power consumption (lower acceleration), the heat generation from the linear motor decreases accordingly. The controller adjusts the heater's operation to match this reduced thermal load, rather than maintaining a constant high heating capacity. This dynamic coordination between driving profile, cooling capacity, and heating amount ensures temperature stability while minimizing total power consumption during standby and low throughput operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces power consumption by decreasing the acceleration and cooling capacity in line with production needs, minimizing waste power usage and maintaining temperature stability without unnecessary stabilization times.
Implementation Method 1
a linear motor for driving a positioning table... heat generating sources such as a linear motor for driving a positioning table
Implementation Method 2
a cooler and heater... cool a medium (liquid or gas) for cooling the linear motor by the cooler
Implementation Method 3
cool a medium (liquid or gas) for cooling the linear motor
Implementation Method 4
heat the medium to a predetermined temperature by the heater
Data Source
AI summary
The present invention provides a lithography apparatus for forming a pattern on a substrate, including a motor configured to drive a table for holding the substrate in accordance with a driving profile, a setting unit configured to set one of a normal mode and a power saving mode as an operation mode of the motor, and a controller configured to change the driving profile when the power saving mode is set, such that an amount of generated heat of the motor caused by driving of the table is smaller than that in the normal mode, and the number of substrates to be processed by the lithography apparatus per unit time is satisfied.