Lithography Optical System Segmented Control Architecture
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Solution Overview
Problem
Conventional optical systems in lithography apparatuses are vulnerable to failures due to shared signal and power lines, leading to system-wide disruptions and lengthy maintenance when a defect occurs, especially with central control devices located in vacuum housings.
Innovation Solution
The optical system employs dedicated bundles of electrical lines for each arrangement, ensuring that a defect in one bundle only affects the specific arrangement connected to it, allowing the system to operate partially and avoiding complete system failure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a central control device is used to control multiple arrangements, then device complexity is reduced, but reliability deteriorates because a single defect can cause system-wide failure
Solution Approach 1:
The control system is segmented into multiple independent control units, where each control unit is assigned to control specific arrangements. This segmentation ensures that a defect in one control unit does not propagate to other control units, thereby maintaining system reliability while managing complexity through modular architecture.
Solution Approach 2:
Dedicated bundles of electrical lines act as intermediaries between control units and arrangements. Each bundle is exclusively assigned to transmit signals between a specific control unit and its assigned arrangements, preventing cross-contamination of defects and ensuring that failures remain localized.
2Device complexity
If shared electrical lines are used for multiple arrangements, then device complexity is reduced, but reliability deteriorates because a defect affects all connected arrangements
Solution Approach 1:
The electrical connection structure is segmented into dedicated bundles, where each bundle is exclusively assigned to connect a specific control unit with its assigned arrangements. This eliminates shared electrical lines and ensures that defects are confined to individual bundles, preventing system-wide disruptions.
Solution Approach 2:
Each bundle of electrical lines has a specific local function of connecting a particular control unit to its assigned arrangements. This localized assignment ensures that the quality and reliability of electrical connections are optimized for each specific connection path, and defects do not affect other connection paths.
3Productivity
If a defect occurs in the central control device or shared lines, then system operation stops, but maintenance time increases due to vacuum housing location
Solution Approach 1:
The control system is divided into independent control units that can be individually accessed and maintained. This segmentation allows maintenance personnel to work on specific control units without affecting the entire system, reducing maintenance time and improving system availability even when components are located in vacuum housings.
Solution Approach 2:
The system is designed to continue operating with reduced functionality when a defect occurs in one control unit or bundle. This partial operation capability maintains productivity by allowing unaffected arrangements to continue functioning while maintenance is performed on the defective components.
Data Source
AI summary
An optical system comprises: a plurality of optical components for guiding radiation in the optical system; a plurality of assemblies, each assembly comprising at least one actuator/sensor device assigned to one of the optical components; and a number of actuating units for actuating the plurality of assemblies. Each actuating unit is assigned at least two of the assemblies. An interface is provided for electrically coupling the respective actuating unit to the assemblies assigned to the actuating unit to transmit respective electrical signals between the actuating unit and the respective assemblies assigned to the actuating unit. The respective electrical signals comprise a data signal and/or electrical energy for operating the respective assembly. The interface for each assembly assigned to the actuating unit has a respective bundle of electrical cables.