Lithography Optical System With External Transceiver Feedthrough
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Solution Overview
Problem
EUV lithography apparatuses face challenges with low data transfer rates and high maintenance complexity due to the use of optical transceiver modules in vacuum environments, which are prone to failure and require complex maintenance procedures.
Innovation Solution
An optical system with a vacuum-tight housing separate from the vacuum housing, containing an optical transceiver module for converting optical signals to electrical signals, allowing for optical data transfer via waveguides externally and electrical transfer internally, with an electrical feedthrough connecting the two housings.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If an optical transceiver module is installed in the vacuum housing for optical data transfer, then data transfer rate is improved, but reliability deteriorates due to higher failure probability in vacuum environment
Solution Approach 1:
The patent introduces an intermediary electrical feedthrough as a mediator between the vacuum housing and external environment. This feedthrough allows electrical signals to pass through the vacuum barrier, enabling the optical transceiver module to be positioned externally while maintaining electrical connectivity to internal components, thus avoiding direct installation of fragile optical modules in the vacuum environment.
Solution Approach 2:
The patent replaces the mechanical/optical data transfer system with an electrical signal transmission system through the vacuum barrier. Instead of using optical waveguides that would require physical penetration into the vacuum housing, the system uses electrical feedthroughs to transmit control and data signals, substituting a more reliable electrical interface for the problematic optical interface in vacuum.
2Speed
If an optical transceiver module is installed in the vacuum housing, then data transfer rate is improved, but ease of repair deteriorates due to complex maintenance procedures
Solution Approach 1:
The electrical feedthrough acts as an intermediary access point that allows maintenance personnel to replace or service the optical transceiver module from the external environment without needing to breach the vacuum housing. The feedthrough's electrical connections can be disconnected and reconnected externally, enabling simple module replacement while maintaining vacuum integrity.
Solution Approach 2:
The patent segments the system into three distinct parts: the vacuum housing containing sensitive optical components, the external optical transceiver module, and the electrical feedthrough as the interface. This segmentation allows the transceiver module to be independently replaceable without affecting the vacuum housing or internal components, greatly simplifying maintenance procedures.
3Reliability
If copper-bound transmission is used for data transfer, then reliability is improved, but data transfer rate deteriorates
Solution Approach 1:
The patent merges two transmission methods into a hybrid system: copper-bound electrical transmission through the vacuum feedthrough for reliable signal penetration, and optical waveguide transmission externally for high-speed data transfer. This combination leverages the strengths of both mediums, using electrical transmission where reliability is critical (through the vacuum barrier) and optical transmission where speed is critical (in the external environment).
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances data transfer rates and simplifies maintenance by maintaining the vacuum integrity during module replacement, balancing fast and reliable data transfer with ease of serviceability.
Implementation Method 1
an optical transceiver module for converting optical signals into electrical signals, which is connectable to a controller via at least one optical waveguide
Implementation Method 2
an electrical vacuum feedthrough that connects the vacuum housing and the vacuum-tight housing and serves to feed at least one electrical connection connected to at least one of the actuator/sensor devices from the vacuum-tight housing into the vacuum housing
Implementation Method 3
connectable to a controller via at least one optical waveguide
Data Source
AI summary
An optical system for a lithography apparatus, comprises: a vacuum housing under vacuum, in which a number of optical elements for guiding radiation in the optical system and a number of actuator/sensor devices assigned to the optical elements are arranged; a vacuum-tight housing that is separate from the vacuum housing and under atmospheric pressure; and an electrical vacuum feedthrough that connects the vacuum housing and the vacuum-tight housing and serves to feed at least one electrical connection connected to at least one of the actuator/sensor devices from the vacuum-tight housing into the vacuum housing. An optical transceiver module for converting optical signals into electrical signals, which is connectable to a controller via at least one optical waveguide, is arranged in the interior of the vacuum-tight housing and is electrically connected to the electrical vacuum feedthrough.