Lithography Pattern Decompression Using Multiple Dictionaries
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Solution Overview
Problem
Lithographic apparatuses face challenges in efficiently processing and storing large amounts of data for complex patterns, leading to limitations in pattern formation speed and cost constraints due to the need for hardware capable of online decompression and handling pattern variations.
Innovation Solution
A lithographic apparatus with an array of individually controllable elements, a compressed-pattern memory, and a dictionary decompressor that uses a first dictionary memory and decoder to decompress data by referencing repeating sequences stored in a dictionary memory, optimizing data processing and storage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If bitmap form is used to represent high concentration device features, then pattern detail is improved, but data size increases making processing and storage difficult and expensive
Solution Approach 1:
The patent transforms the data representation from a standard bitmap format to a run-length encoded format, changing the parameter of data organization. This encoding method represents consecutive pixels of the same value as a single value with a count, dramatically reducing data size while preserving the ability to reconstruct the original high-detail pattern when needed.
Solution Approach 2:
The patent creates a compressed copy of the pattern data using run-length encoding, which stores only the essential information needed to reproduce the original pattern. This compressed copy occupies minimal storage space but can be fully decompressed to recreate the detailed bitmap pattern for manufacturing operations.
2Productivity
If hardware capable of online decompression is provided, then pattern formation speed is improved, but device cost increases
Solution Approach 1:
The patent performs the compression action in advance during pattern data preparation, creating a run-length encoded representation before the lithographic exposure process. This preliminary encoding eliminates the need for complex real-time decompression hardware during pattern formation, as the compressed data can be directly processed or quickly decompressed using simpler algorithms.
3Adaptability or versatility
If vast memory caches are used to store pattern data, then pattern complexity is improved, but memory cost and system complexity increase
Solution Approach 1:
The patent changes the parameter of data storage from storing complete bitmap values to storing run-length encoded sequences. This parameter transformation allows the system to handle complex patterns with limited memory resources, as the encoded format requires significantly less storage space while maintaining full pattern information for reconstruction.
Data Source
AI summary
A lithographic apparatus comprises an array of individually controllable elements that modulate a beam of radiation, a compressed-pattern memory that stores a compressed representation of a requested dose pattern to be formed on a substrate by the modulated beam, and a dictionary decompressor that at least partially decompresses the compressed representation. The dictionary decompressor comprises an external dictionary memory, a first dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the external dictionary memory, portions of pattern data corresponding to references to the external dictionary memory contained in the compressed representation, and a second dictionary decoder having an internal dictionary memory, the second dictionary decoder that at least partially decompresses at least a part of the compressed representation by extracting, from the internal dictionary memory, portions of pattern data corresponding to references to the internal dictionary memory contained in compressed representation.