Dual-Stage Lithography Positioning Device with Alternating Module Swaps
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Solution Overview
Problem
Current dual-stage lithographic apparatuses face inefficiencies in substrate processing due to idle time between processing sequences, as one positioning module finishes a processing sequence while the other is still engaged, leading to suboptimal use of the system's time and resources.
Innovation Solution
The positioning device and method involve alternating positioning of modules between processing fields, allowing one module to complete a processing sequence while the other is positioned closer, reducing idle time by enabling simultaneous preparation and measurement tasks, and optimizing the layout of sensors and modules to facilitate quicker swaps and overlapping processing steps.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If one positioning module finishes a processing sequence while the other is still engaged, then the system maintains sequential processing simplicity, but idle time increases and overall productivity decreases
Solution Approach 1:
The patent applies preliminary action by positioning the second positioning module closer to the first positioning module during the final steps of the first processing sequence, before the actual swap occurs. This preparatory positioning reduces the travel distance and time required for the module to move to the other processing field, thereby minimizing idle time and improving overall substrate processing throughput
Solution Approach 2:
The patent implements continuity of useful action by ensuring that while one positioning module is completing its processing sequence, the other positioning module is already in position or moving to the optimal position for its next task. This overlapping of operations eliminates idle time between sequences, maintaining continuous productive action across both modules and enhancing overall system productivity
2Productivity
If positioning modules are positioned closer together during swaps, then swap time is reduced and productivity improves, but position measurement accuracy may be compromised
Solution Approach 1:
The patent applies preliminary action by pre-positioning the second positioning module closer to the first positioning module during the final steps of processing, before the swap operation begins. This advance positioning reduces the distance to be traveled during the swap, minimizing swap time and improving productivity while maintaining measurement accuracy through controlled, gradual movement
Solution Approach 2:
The patent implements dynamics by making the positioning of modules adaptive and variable - the distance between modules is dynamically adjusted based on the processing stage. During final processing steps, modules are positioned closer to reduce swap time, while during measurement phases, adequate distance is maintained to ensure measurement precision. This dynamic adjustment resolves the contradiction between swap efficiency and measurement accuracy
Data Source
AI summary
A positioning device, including: a first positioning module arranged to support and position a first substrate, a second positioning module arranged to support and position a second substrate, a first positioning field in which the first and second positioning modules can be alternatingly positioned to carry out a first processing sequence, a second positioning field in which the first and second positioning modules can be alternatingly positioned to carry out a second processing sequence, wherein when one of the first and second positioning modules is carrying out or finishing the first processing sequence, the other of the first and second positioning modules has finished the second processing sequence and is positioned closer to the one of the first and second positioning modules.