Lithography Positioning Apparatus with Single Guide and Rotation Bearing
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Solution Overview
Problem
Existing substrate positioning apparatuses have a limited adjustable range for rotation about the Z-axis, restricting the stroke and alignment precision in lithography and imprint processes.
Innovation Solution
A positioning apparatus with a single guide constraining movement in one direction and a drive mechanism that includes a rotation bearing, allowing a movable part to move in a predetermined range, enabling larger stroke and alignment adjustments with a simple arrangement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If both ends of the intermediate stage element are constrained in the X-direction, then positioning with regard to the X-axis, Y-axis, and θZ-axis can be performed with a simple arrangement, but the stroke on the θZ-axis is extremely restricted
Solution Approach 1:
The patent extracts the constraint function from both ends of the intermediate stage element and applies it only to one end. By removing the constraint at the second end, the system achieves larger θZ-axis stroke while maintaining positioning capability through the single guide mechanism at the first end.
Solution Approach 2:
The patent segments the constraint application into two parts: the first end of the intermediate stage element has both X-direction constraint and guide mechanism, while the second end has only X-direction constraint without guide mechanism. This segmentation allows differential movement capability.
2Device complexity
If a single guide constrains the movable part in the second direction, then the arrangement is simple, but the adjustable range for rotation about the Z-axis is limited
Solution Approach 1:
The patent introduces dynamic movement capability to the second end of the intermediate stage element by not constraining it in the Y-direction. This allows the intermediate stage element to rotate dynamically about the Z-axis with larger stroke, while the single guide at the first end maintains positional control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances the adjustable range for rotation about the Z-axis, improving alignment precision and stroke in lithography and imprint processes, allowing for more accurate pattern transfer and substrate processing.
Implementation Method 1
a rotation bearing, allowing a movable part to move in a predetermined range
Data Source
AI summary
An apparatus for moving movable part on surface parallel to first and second directions includes single guide to constrain position of the movable part in the second direction and drive mechanism to drive the movable part. The movable part includes first movable member movable in the first direction while being guided by the guide, second movable member having first and second ends, the first end being connected to the first movable member via rotation bearing and moving above the surface, and third movable member movable within range between the first and second ends while being guided by the second movable member. The drive mechanism includes first driver to drive the first end of the second movable member in the first direction, and second driver to drive the second end of the second movable member in the first direction.