Lithography Light Source Reflector Layout for Illuminance Loss
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing light source apparatus for lithography processes experiences illuminance reduction due to light being shielded by components such as lead wires and nozzles.
Innovation Solution
The light source apparatus incorporates a reflector unit between the condenser unit and the light shielding unit, which reflects light that would otherwise be blocked, ensuring it is condensed onto the intended focal point.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If lead wires and nozzles are disposed in the optical path for cooling the base unit, then the base unit can be cooled effectively, but the illuminance of the light emitted from the light source apparatus reduces
Solution Approach 1:
A reflector unit is introduced as an intermediary component between the condenser unit and the light shielding unit. The reflector unit captures light that would otherwise be blocked by the lead wire or nozzle, reflects it toward the condensing point, thereby maintaining illuminance while allowing the cooling components to remain in place
Solution Approach 2:
The light shielding effect of the lead wire and nozzle, which originally causes illuminance reduction, is converted into a beneficial arrangement by positioning the reflector unit to redirect light around these components. The harmful light blockage is transformed into an opportunity to optimize light path design that accounts for necessary cooling infrastructure
2Illumination intensity
If a reflector unit is added to redirect light around shielding components, then illuminance reduction is suppressed, but the device complexity increases
Solution Approach 1:
The reflector unit is positioned specifically in the region where light is blocked by the lead wire or nozzle, providing localized light redirection only where needed. This targeted approach maintains illuminance in critical areas without requiring a complete redesign of the entire light source apparatus
Solution Approach 2:
The reflector unit utilizes the spatial dimension between the condenser unit and the light shielding unit to redirect light paths. By operating in this three-dimensional space, the system can route light around obstacles without adding significant structural complexity to the overall apparatus design
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses illuminance reduction by redirecting light that was previously obstructed, maintaining the intensity of the light emitted from the light source apparatus.
Implementation Method 1
a condenser unit configured to reflect light from a light source and to condense the light on a condensing point
Implementation Method 2
a reflector unit disposed between the condenser unit and the light shielding unit and configured to reflect the light from the condenser unit. The reflector unit is disposed so that reflected light is condensed by the condenser unit toward the condensing point
Data Source
AI summary
A light source apparatus configured to emit light includes a condenser unit configured to reflect light from a light source and to condense the light on a condensing point, a light shielding unit disposed on an optical path of the light from the condenser unit, and a reflector unit disposed between the condenser unit and the light shielding unit and configured to reflect the light from the condenser unit. The reflector unit is disposed so that reflected light is condensed by the condenser unit toward the condensing point.