Charged Particle Lithography Sensor Assembly Segmentation
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Solution Overview
Problem
The integration of a sensor assembly within the target holder inside a vacuum chamber in charged particle lithography systems hinders the accurate movement of the target, as the sensor connection to a control device outside the chamber is obstructed.
Innovation Solution
The sensor assembly is reconfigured to be arranged at a distance from the target positioning device, with a light optical lens directing light from the converter element to a light sensor located outside the vacuum chamber, allowing for independent positioning and connection to a control device without interfering with the target's movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the sensor assembly is integrated in the target holder inside the vacuum chamber, then the converter element can be positioned at the same level as the target surface for accurate beam characterization, but the connection to the control device outside the vacuum chamber is hindered and obstructs accurate target movement
Solution Approach 1:
The sensor assembly is divided into two separate parts: the converter element remains integrated with the target holder inside the vacuum chamber for accurate beam characterization, while the light sensor is positioned outside the vacuum chamber for easy connection to control devices and unobstructed target movement. The optical lens bridges these two segments to transmit light signals.
Solution Approach 2:
An optical lens is introduced as an intermediary component between the converter element inside the vacuum chamber and the light sensor outside. This mediator transmits the light signals generated by charged particle conversion while allowing physical separation of the sensor components, thus resolving the contradiction between measurement accuracy and operational freedom.
2Measurement precision
If the sensor assembly is integrated in the target holder, then the converter element can be positioned at the same level as the target surface, but the assembly complexity increases and connection to control device becomes difficult
Solution Approach 1:
The sensor system is segmented into a compact converter element integrated with the target holder and a separate light sensor positioned outside the vacuum chamber. This segmentation reduces the complexity of the integrated assembly while maintaining the ability to detect beam characteristics accurately through the optical coupling provided by the lens.
3Volume of moving object
If the light sensor is positioned close to the converter element, then the assembly is compact, but the connection to control device outside vacuum chamber is obstructed and target movement is hindered
Solution Approach 1:
The optical lens serves as a mediator that enables the light sensor to be positioned at a distance from the converter element while still receiving sufficient light for accurate detection. This allows the sensor assembly to be more compact in terms of light path length while maintaining operational freedom for target movement and external connections.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This arrangement enables accurate determination of charged particle beam characteristics without obstructing the target's movement, allowing for improved positioning and alignment of the charged particle optical unit, and enhances the light-gathering ability and resolution of the system.
Implementation Method 1
a converter element for converting charged particles which impinge on said converter element into light
Implementation Method 2
a light optical lens which is arranged between the converter element and the light sensor for directing light originating from said converter element to said sensor
Data Source
AI summary
The invention relates to a charged particle lithography system for transferring a pattern onto a target, said system comprising:a target positioning device comprising a target holder having a first side for holding the target,a charged particle optical unit for generating a charged particle beam, modulating said charged particle beam, and directing said charged particle beam towards the first side of the target holder, anda sensor assembly comprising a converter element for converting charged particles which impinge on said converter element into light, wherein the converter element is arranged on said target positioning device, a light sensor for detecting the light, wherein the light sensor is arranged at a distance from said target positioning device, and a light optical lens which is arranged between the converter element and the light sensor for directing light originating from said converter element to said sensor.