Lithography Shutter Blade Hollow Design for Torque Reduction
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Solution Overview
Problem
Conventional mechanical shutters in photolithography machines face reliability and stability issues when operating with high-power light sources, leading to challenges in exposure dose control accuracy and system stability.
Innovation Solution
A shutter device with a shutter blade, rotating motor, controller, and supporter, featuring a speed reducer and hollow shielding portions, which allows for efficient opening and closing at high speeds while reducing torque requirements and improving exposure dose control accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If high-power voice coil motors are used to achieve faster shutter opening and closing, then shutter operation speed is improved, but reliability and stability deteriorate
Solution Approach 1:
The patent replaces the voice coil motor (electromagnetic actuator) with a galvanometer scanning system. The galvanometer uses a coil suspended in a magnetic field to drive a mirror, and this motion is transferred to the shutter blade through a mechanical coupling. This substitution leverages the galvanometer's superior reliability and stability in precision scanning applications while achieving the required fast shutter operation.
Solution Approach 2:
The patent applies a galvanometer scanning system originally designed for mirror deflection to control the shutter blade. By using a universal precision scanning mechanism for both purposes (mirror positioning and shutter control), the system achieves reliable and stable fast operation without requiring a specialized high-power actuator.
2Illumination intensity
If high-power light sources are used to maintain exposure dose, then illumination intensity is improved, but shutter operation frequency must increase, worsening system stability
Solution Approach 1:
The patent replaces the mechanical shutter actuation system with a galvanometer-based control system. The galvanometer's precise and rapid angular control enables the shutter to respond quickly to exposure timing requirements, allowing the use of high-power light sources without requiring excessively frequent shutter operations that would compromise stability.
3Device complexity
If conventional mechanical shutters are used, then structural simplicity is maintained, but exposure dose control accuracy deteriorates under high-power operation
Solution Approach 1:
The patent adapts the galvanometer scanning mechanism—a device designed for precise angular positioning—to control the shutter blade. The galvanometer's inherent precision in controlling mirror angles translates directly to precise control of the shutter blade's position and timing, enabling accurate exposure dose control even with high-power light sources.
Solution Approach 2:
The patent substitutes the conventional mechanical shutter actuation mechanism with a galvanometer-driven system. The galvanometer's electromagnetic control provides superior timing precision and repeatability compared to traditional mechanical actuators, thereby improving exposure dose control accuracy while maintaining relatively simple overall structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively shortens shutter opening and closing times, enhancing exposure dose control accuracy and photolithography machine performance by reducing the burden on the control system and improving reliability.
Implementation Method 1
a rotating motor for driving the shutter blade to rotate
Data Source
AI summary
A shutter device for use in exposure by a photolithography machine and a method of using the shutter device are disclosed. The device includes a shutter blade (1); a rotating motor (2) for driving the shutter blade (1) to rotate; a controller in electric connection with the rotating motor (2); and a supporter (3) for supporting the rotating motor (2). The shutter blade (1) includes a rotation center (11) and, disposed in correspondence with the rotation center (11), at least one open portion (12) and at least one shielding portion (13). The rotation center (11) is coupled to the rotating motor (2) which drives the shutter blade (1) to rotate so that the shutter device opening and closure are accomplished to enable and disable exposure. The shielding portion (13) includes a hollow portion (131) which significantly reduces the mass of the shutter blade (1), thereby facilitating the control over the rotation of the shutter blade (1). Under the control of the controller, the opening and closing of the shutter is accomplished during rotation of the shutter blade (1) at a constant speed, while the acceleration and deceleration of the shutter blade (1) take place in the period when the shutter device is in a closed state, which is relatively long and allows a large stroke. This significantly reduces the required torque of the rotating motor (2) and effectively shortens the shutter opening and closing time.