Lithography Stage Coil Cooling via Segmented Refrigerant Channels
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing cooling mechanisms for linear motor coils in lithography apparatuses face reliability issues due to corrosion and short-circuiting caused by direct contact between the coil's lead wires and refrigerants, leading to heat transfer inefficiencies and reduced substrate stage reliability.
Innovation Solution
A stage apparatus with a first channel to supply a refrigerant for heat recovery from the coil without contact, a cover member with a second channel for additional heat recovery, and a sheet member to prevent direct heat transfer to the fine moving stage, using low-emissivity materials and high-heat-conductivity materials to manage heat effectively.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Temperature
If the space around the linear motor coil is filled with a fluid refrigerant to recover heat, then heat recovery efficiency is improved, but the reliability of the coil deteriorates due to corrosion and short-circuiting of lead wires
Solution Approach 1:
The cooling space is segmented into two separate channels: a first channel through which the refrigerant flows to recover heat from the coil, and a second channel that is sealed to prevent refrigerant contact with the coil. This segmentation allows heat recovery while isolating the coil from corrosive refrigerant environment.
Solution Approach 2:
A cover member is introduced as an intermediary component between the refrigerant and the coil. The cover member has a sealed second channel that prevents direct contact between the refrigerant and the coil, while still allowing heat recovery through the first channel. This intermediary structure resolves the contradiction by enabling heat transfer without direct refrigerant-coil contact.
2Reliability
If a coating process is applied to the lead wire to prevent corrosion, then protection is provided, but the complexity of manufacturing increases and the coating may still corrode over time
Solution Approach 1:
The lead wire is extracted from the corrosive environment by routing it through the sealed second channel of the cover member, which is filled with refrigerant but prevents contact. This removes the need for protective coatings on the lead wire, simplifying manufacturing while maintaining reliability.
Solution Approach 2:
The cover member acts as an intermediary barrier that isolates the lead wire from the refrigerant. By providing this physical separation, the cover member eliminates the need for additional protective coatings, reducing manufacturing complexity while ensuring long-term reliability.
3Temperature
If the coil is directly cooled by refrigerant contact, then heat recovery is maximized, but heat transfer to the fine moving stage increases causing positioning errors
Solution Approach 1:
The cooling system is segmented into two independent channels: the first channel enables heat recovery from the coil, while the second sealed channel prevents heat transfer to the fine moving stage. This segmentation allows simultaneous achievement of heat recovery and positioning precision.
Solution Approach 2:
Different regions of the cooling system are given different properties: the first channel allows heat transfer for recovery, while the second channel is sealed to prevent heat transfer to the fine moving stage. This local differentiation of thermal properties enables both heat recovery and precision positioning.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces heat transfer to the fine moving stage, maintains the reliability of the substrate stage by preventing corrosion, and ensures high-precision positioning of substrates during pattern transfer.
Implementation Method 1
a first channel (224) formed in the coarse moving stage (220) to supply a first refrigerant for recovering heat from the coil (222) not to contact the coil (222)
Implementation Method 2
a second channel (80) formed in the cover member (60) to supply a second refrigerant for recovering heat from the cover member (60) not to contact the coil (222)
Implementation Method 3
using low-emissivity materials and high-heat-conductivity materials to manage heat effectively
Data Source
AI summary
The present invention provides a stage apparatus which holds a substrate, including a first moving stage, a second moving stage supported by the first moving stage, a linear motor including a coil arranged on the first moving stage, and a magnet arranged on the second moving stage in correspondence with the coil, a first channel formed in the first moving stage to supply a first refrigerant for recovering heat from the coil not to contact the coil, a cover member arranged on the first moving stage to surround the coil and be spaced apart from the coil, and a second channel formed in the cover member to supply a second refrigerant for recovering heat from the cover member not to contact the coil.