Lithography Substrate Transfer Apparatus With Segmented Fingers
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The semiconductor industry faces challenges in maximizing wafer throughput while minimizing capital and operational costs, particularly in lithography systems where efficient substrate transfer is critical for maintaining high accuracy and reliability, especially in limited clean room space.
Innovation Solution
A substrate transfer apparatus with distinct sets of fingers for handling both unclamped and clamped substrates, allowing for secure transfer between different heights and locations within a lithography system, utilizing a robot arm with jointed sections for vertical and horizontal movement, and a load lock system for efficient transfer of clamped substrates.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single set of fingers is used to carry both unclamped and clamped substrates, then the device complexity is reduced, but the manufacturing precision and reliability of substrate transfer deteriorate due to the different shapes and weights of unclamped and clamped substrates
Solution Approach 1:
The finger assembly is segmented into a first set of fingers for carrying unclamped substrates and a second set of fingers for carrying clamped substrates. Each set is specifically designed with appropriate shape, size, and clamping force characteristics matched to its intended substrate type, thereby achieving precise and reliable transfer for both substrate configurations.
Solution Approach 2:
The apparatus employs movable or adjustable fingers that can change their configuration or engagement characteristics. The fingers are designed to adapt their shape or clamping force dynamically based on whether they are engaging an unclamped or clamped substrate, allowing a single apparatus to handle both types with optimal precision.
2Device complexity
If the fingers of the first set are positioned above the fingers of the second set, then the structure is simplified, but the fingers of the first set interfere with the substrate support structure when carrying clamped substrates
Solution Approach 1:
The finger sets are arranged in the vertical dimension rather than horizontal overlap. The first set of fingers is positioned below the second set, creating a vertical stacking arrangement that eliminates horizontal interference while maintaining both functional capabilities. This spatial reconfiguration in the vertical dimension resolves the interference problem.
3Adaptability or versatility
If a robot arm with large movement range is used to transfer substrates between locations at different heights, then the adaptability is improved, but the device complexity and footprint increase
Solution Approach 1:
The apparatus integrates multiple functional components in a nested or compact stacked arrangement. The body structure accommodates both sets of fingers in a space-efficient configuration, and the robot arm components are arranged to maximize movement range within a minimized footprint, allowing vertical and horizontal transfers without excessive space occupation.
Data Source
AI summary
An apparatus for transferring a target, such as a substrate or a substrate support structure onto which a substrate has been clamped, from a substrate transfer system to a vacuum chamber of a lithography system. The apparatus comprises a load lock chamber for transferring the target into and out of the vacuum chamber. The load lock chamber comprises a first wall with a first passage providing access between a robot space and the interior of the load lock chamber, a second wall with a second passage providing access between the interior of the load lock chamber and the vacuum chamber, and plurality of handling robots for transferring the targets comprising: a first handling robot movable within the robot space to access the substrate transfer system and the first passage; and a second handling robot movable within the load lock chamber to access the first passage and the second passage.