Temperature-Controlled Vibration Damper for Lithography Stability
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Solution Overview
Problem
Existing projection exposure apparatuses for semiconductor lithography face challenges in maintaining imaging quality due to vibrations and temperature-dependent changes in damping elements, which can lead to inadequate damping of parasitic disturbances.
Innovation Solution
A vibration damper with a temperature control device is integrated into the projection exposure apparatus, allowing for precise control of the damping element's temperature, thereby maintaining consistent stiffness and damping, and enabling tuning of the natural frequency of the vibration damper.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If tuned vibration dampers are used for individual frequencies, then the damping effect can be optimized for specific frequencies, but the damping performance deteriorates when temperature varies due to changes in elastomer stiffness and damping properties
Solution Approach 1:
The patent applies parameter changes by actively controlling the temperature of the damping element to maintain optimal damping properties. A temperature control device is integrated into the vibration damper to regulate the temperature of the elastomer, preventing stiffness and damping variations that would otherwise occur with temperature fluctuations. This ensures consistent damping performance across different operating temperatures.
2Reliability
If the mass of the vibration damper is increased to improve damping effect, then the damping capability increases, but the natural frequency of the damper changes, requiring retuning
Solution Approach 1:
The patent applies dynamics by making the vibration damper可调 (adjustable) through temperature control. By dynamically adjusting the temperature of the elastomer, the stiffness and damping properties can be tuned to maintain optimal performance at different frequencies. This allows the damper to adapt to changing operating conditions without requiring physical redesign or retuning of the mass.
3Reliability
If elastomers are used as damping elements, then the damping effect is improved, but the material properties such as stiffness and damping become temperature-dependent, reducing damping effectiveness
Solution Approach 1:
The patent applies parameter changes by actively controlling the temperature parameter of the elastomer damping element. A temperature control device is integrated into the vibration damper to maintain the elastomer at an optimal temperature range, preventing temperature-dependent variations in stiffness and damping properties. This ensures stable material properties and consistent damping effectiveness across different operating conditions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The temperature-controlled vibration damper effectively reduces the impact of temperature variations on damping performance, ensuring improved imaging quality by consistently damping parasitic vibrations and maintaining the desired natural frequency.
Implementation Method 1
a vibration damper with a holder and a mass connected to the holder via a damping element
Implementation Method 2
Elastomers are often used as damping elements and their material properties, such as stiffness and damping
Implementation Method 3
the vibration damper comprises a temperature control device for temperature control of the damping element
Implementation Method 4
The temperature control device can help make it possible to control the temperature of the temperature-sensitive damping element
Data Source
AI summary
A projection exposure apparatus has a vibration damper with a holder and a mass that is connected to the holder via a damping element. The vibration damper comprises a temperature control device for the temperature control of the damping element. The disclosure also relates to a method for designing a vibration damper.