Load Cell Integrated Chemical Storage Canister
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Solution Overview
Problem
Current methods for monitoring chemical levels in storage canisters used in the semiconductor industry are not universally applicable and often result in waste and increased costs due to inadequate real-time monitoring and visual indication of contents, particularly when the specific gravity of the precursor chemical changes.
Innovation Solution
A chemical storage device integrating a load cell with a processor and display, capable of taring the empty weight, calibrating for attached dispensing devices, and continuously displaying the weight of chemicals remaining, ensuring accurate real-time monitoring regardless of chemical type or phase.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If float switches or level sensors are used to monitor chemical levels, then some level indication is provided, but the measurement becomes unreliable when the specific gravity of the precursor chemical changes
Solution Approach 1:
The patent replaces float switches and level sensors (mechanical systems) with a load cell that measures weight directly. This substitution eliminates reliance on chemical properties like specific gravity, providing reliable measurements across varying chemical compositions. The load cell converts mechanical weight into an electrical signal for digital display.
Solution Approach 2:
The invention changes the measurement parameter from position-based (float switches) or level-based (sensors) to weight-based measurement. By measuring the weight of the canister before and after chemical dispensing, the system accurately determines chemical consumption regardless of changes in chemical density or specific gravity.
2Loss of information
If level sensors are used to monitor chemical contents, then automatic detection is provided, but visual indication of contents is not available and requires connection to dispensing equipment
Solution Approach 1:
The load cell system provides self-contained functionality with an integrated display that directly shows chemical remaining on the canister itself. This eliminates the need to connect to external dispensing equipment or interpret signals from separate level sensors, making the system self-sufficient and easier to operate.
Solution Approach 2:
The load cell serves multiple functions: it measures the weight of the canister, calculates chemical remaining, provides visual display on the canister itself, and works with any chemical type. This multi-functionality replaces the need for separate level sensors and external monitoring systems.
3Reliability
If canisters are replaced before maximal depletion to ensure adequate precursor remains, then adequate chemical supply is maintained, but material waste and disposal costs increase
Solution Approach 1:
The load cell provides continuous feedback on the exact amount of chemical remaining in the canister through weight measurement. This real-time information allows operators to monitor depletion accurately and replace canisters only when necessary, preventing both premature replacement (waste) and delayed replacement (inadequate supply).
Solution Approach 2:
By providing advance warning through continuous weight monitoring, the system allows operators to plan canister replacement at the optimal time. The real-time data enables proactive scheduling of replacement before complete depletion occurs, avoiding both waste from early replacement and production disruption from late replacement.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables real-time monitoring of chemical usage, reducing waste and costs by providing a universal and accurate measurement of chemical levels, ensuring maximum utilization of precursor chemicals before canister replacement.
Implementation Method 1
The load cell is capable of compensating for the added weight of attached dispensing devices used in the semiconductor industry. Additionally, the load cell continuously displays the weight of the chemicals remaining in the chemical storage device.
Data Source
AI summary
A chemical storage device and a method for monitoring chemical usage are described herein. The device and disclosed method utilize a chemical storage canister and a load cell integrated into one transportable unit. The load cell is capable of compensating for the added weight of attached dispensing devices used in the semiconductor industry. Additionally, the load cell continuously displays the weight of the chemicals as they are withdrawn from the chemical storage device. These functionalities are included in the control logic of the load cell which is incorporated into the load cell itself.