Load Lock Camera Inspection for Substrate Placement and Defect Detection
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Solution Overview
Problem
Existing inspection systems for film deposition processes on glass and wafers are inefficient in detecting defects and cannot accurately recognize substrate location or process parameters, leading to potential defects in the deposition process.
Innovation Solution
A camera-based inspection system is employed within a film deposition apparatus, utilizing multiple cameras to capture images of substrates and film-deposited substrates, analyzing contrast values and edge lines to detect defects, and a controller to evaluate process parameters such as substrate placement and deposition chamber operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a camera-based inspection system is introduced to detect defects in film deposition, then measurement precision is improved, but device complexity increases
Solution Approach 1:
The inspection system merges multiple cameras into a unified inspection apparatus that captures images of substrates at different positions and angles. The controller integrates images from multiple cameras to comprehensively analyze film deposition defects, achieving high measurement precision while managing system complexity through coordinated operation of combined components.
Solution Approach 2:
The controller acts as an intermediary that receives images from multiple cameras, processes them through image processing units, and generates comprehensive defect analysis. This intermediary component coordinates the complex interactions between multiple cameras and analysis algorithms, enabling high measurement precision without requiring direct complex connections between all system components.
2Measurement precision
If multiple cameras are used to capture substrate images through viewport windows, then measurement precision is improved, but the viewport window design becomes more complex
Solution Approach 1:
The viewport window system is segmented into multiple discrete windows, each dedicated to a specific camera. This segmentation allows each camera to have its own optimized viewport opening positioned at the most favorable location for capturing substrate images, thereby improving measurement precision while simplifying the overall design by avoiding complex multi-camera integration through a single window.
3Productivity
If real-time image analysis is performed to detect defects during deposition, then productivity is improved through immediate feedback, but use of energy increases due to continuous processing
Solution Approach 1:
The inspection system employs periodic image capture and analysis rather than continuous operation. Images are captured at specific intervals during the film deposition process, and the controller performs analysis only at these periodic moments. This approach maintains high productivity by providing timely defect detection while significantly reducing energy consumption compared to continuous real-time processing.
Data Source
AI summary
A method of inspection and an inspection system for the film deposition process for substrates that includes glass and wafer are disclosed. The inspection system includes multiple camera modules positioned in a load lock unit of a process chamber, such as the camera modules that can capture images of the substrate in the load lock. The images are analyzed by a controller of the inspection system to determine the accuracy of robots in handling the substrate, calibration of the robots based on the analysis, and defects in the substrate caused during the handling and deposition process.