Load Lock Chamber Dispersion Holes for Uniform Cleaning Flow
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Solution Overview
Problem
Existing load lock chamber cleaning methods are time-energy consuming and risk substrate contamination, failing to effectively improve substrate yield due to inefficient gas flow distribution and frequent disassembly requirements.
Innovation Solution
A load lock chamber design featuring dispersion portions with independently arranged dispersion holes that disperse and decelerate gas flows, ensuring uniform distribution and improved contact with inner walls, reducing the need for frequent disassembly and enhancing cleaning effectiveness.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If gas flow is introduced directly into the loading cavity through a single air inlet, then the结构简单 (structure is simple), but the gas flow distribution is uneven and cannot effectively remove particles from inner walls
Solution Approach 1:
The air inlet is divided into multiple dispersion holes arranged in specific patterns, transforming a single large opening into multiple smaller openings. This segmentation enables uniform gas flow distribution across the loading cavity while maintaining structural simplicity, effectively removing particles from inner walls without complex mechanisms
Solution Approach 2:
Different regions of the loading cavity are provided with dispersion holes of different sizes and distributions tailored to local cleaning needs. The dispersion holes are strategically positioned to target specific areas where particle accumulation is most problematic, optimizing cleaning effectiveness in different zones
2Manufacturing precision
If the load lock chamber is regularly disassembled for cleaning, then the inner walls can be thoroughly cleaned, but it consumes time and energy and risks substrate contamination
Solution Approach 1:
The load lock chamber is equipped with a built-in gas flow-based cleaning system that enables it to clean its own inner walls during normal operation or maintenance cycles. The dispersion holes deliver gas flow directly to cleaning targets, allowing the chamber to perform self-cleaning without requiring external disassembly or intervention, thus eliminating time loss and contamination risks associated with frequent disassembly
3Manufacturing precision
If multiple air inlets are added to improve gas flow distribution, then cleaning effectiveness improves, but the device complexity and cost increase
Solution Approach 1:
The dispersion holes serve multiple functions simultaneously: they are part of the normal vacuum system structure, act as gas flow distribution channels for cleaning operations, and can be configured to target specific cleaning zones. This multi-functionality achieves uniform gas flow distribution and effective cleaning without adding separate dedicated cleaning components, thereby avoiding increased device complexity and cost
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The improved gas flow distribution extends the maintenance period of the load lock chamber, reduces maintenance costs, and enhances substrate yield by effectively removing particulate dust from inner walls.
Implementation Method 1
each dispersion hole is in communication with the air inlet portion and a corresponding loading cavity, and is configured to disperse gas flow entering the corresponding loading cavity
Data Source
AI summary
In one aspect, a load lock chamber includes a chamber body. The chamber body is internally provided with at least one load-lock, and is provided with an air inlet portion and an air outlet portion which are communicated with each load-lock. The chamber body is provided with at least one dispersion portion, each dispersion portion is arranged to correspond to one load-lock, each dispersion portion comprises a plurality of independently formed dispersion holes, and each dispersion hole is communicated with the air inlet portion and the corresponding load-lock and is used for dispersing airflow entering the corresponding load-lock.