Load Lock Module Layout for Compact Substrate Transfer

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Solution Overview

Problem

The increasing number of processing modules in semiconductor manufacturing systems leads to a larger system size, making it difficult to arrange multiple systems in facilities like clean rooms due to the increased installation area.

Innovation Solution

A substrate transfer system with an atmospheric substrate transfer module, a vacuum substrate transfer module, and a load lock module positioned on the side surface of the atmospheric module and upper/lower surface of the vacuum module, featuring gate valves and actuators to vertically move substrates between different atmospheric and vacuum environments, reducing the overall system footprint.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the number of processing modules is increased to enhance processing capability, then productivity is improved, but the installation area increases making it difficult to arrange multiple systems in facilities

Engineering Contradiction:

Improveprocessing capabilityVSAvoidinstallation area

Core Design Contradiction:

ProductivityVSArea of stationary object

Solution Approach 1:

The load lock module is positioned on the side surface of the atmospheric substrate transfer module rather than only on the upper or lower surfaces, utilizing lateral space to reduce the system's footprint while maintaining processing capabilities

Inventive Principle:

Principle #17Another dimension (Dimensionality change)

Solution Approach 2:

The load lock module is integrated into the side surface of the atmospheric substrate transfer module, with the container having openings that communicate with both the atmospheric and vacuum substrate transfer modules, creating a nested configuration that optimizes space utilization

Inventive Principle:

Principle #7Nested doll (Nesting)

Data Source

PatentUS11791180B2Substrate transfer system and load lock module

Publication Date: 2023.10.17 TOKYO ELECTRON LTD

AI summary

A substrate transfer system includes an atmospheric substrate transfer module, a vacuum substrate transfer module, and a load lock module disposed on a side surface of the atmospheric substrate transfer module and disposed on an upper surface or a lower surface of the vacuum substrate transfer module. The load lock module includes a container having a first substrate transfer opening and a second substrate transfer opening, a first gate configured to open or close the first substrate transfer opening, a second gate configured to open or close the second substrate transfer opening, and a substrate actuator configured to vertically move a substrate through the second substrate transfer opening between a first position in the container and a second position in the vacuum substrate transfer module.