Load-Lock Module Layout for Continuous Substrate Processing
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Solution Overview
Problem
The existing substrate processing systems face a significant decrease in throughput due to the need for maintenance, as they typically have only one loader module, which requires the entire system to stop operations, leading to reduced operating time.
Innovation Solution
A processing system is designed with multiple load-lock modules and atmospheric transfer modules connected to a vacuum transfer module, allowing for continuous operation even during maintenance of one module by utilizing other modules, and featuring a vacuum transfer module for substrate handling in low pressure and atmospheric transfer modules for environmental transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single loader module is used in the substrate processing system, then the system structure is simple and device complexity is reduced, but the operating time decreases significantly when maintenance is required as the entire system must stop operations
Solution Approach 1:
The loader module is divided into multiple independent load-lock modules (first load-lock module and second load-lock module), each capable of independent operation. This segmentation allows one module to be maintained while others continue processing, resolving the contradiction between simple structure and continuous operation.
Solution Approach 2:
The system configuration changes from a single loader module to multiple load-lock modules with different functional assignments. The first load-lock module handles atmospheric-to-vacuum transfer while the second handles vacuum-to-atmospheric transfer, enabling operational redundancy and continuous processing during maintenance.
2Reliability
If multiple load-lock modules and atmospheric transfer modules are added to enable continuous operation during maintenance, then the operating time increases and system reliability improves, but the device complexity and number of components increase
Solution Approach 1:
The load-lock modules are designed with multi-functionality to handle different transfer operations (atmospheric-to-vacuum and vacuum-to-atmospheric). This universal design reduces the need for completely separate dedicated modules for each function, thereby limiting the increase in device complexity while achieving reliability through redundancy.
Solution Approach 2:
Multiple transfer functions are merged into the load-lock module system, where the same basic module structure serves both atmospheric-to-vacuum and vacuum-to-atmospheric transfers. This combining approach reduces overall system complexity compared to having completely separate dedicated modules for each function.
3Device complexity
If a single loader module is used, then the device complexity is low, but the productivity decreases during maintenance as the entire system must halt operations
Solution Approach 1:
The loader functionality is segmented into multiple independent load-lock modules that can operate in parallel or independently. This allows maintenance of one module without affecting others, maintaining productivity during maintenance periods while keeping individual module complexity low.
Solution Approach 2:
The system is designed to maintain continuous substrate processing through multiple load-lock modules. While one module undergoes maintenance, others continue transferring substrates, ensuring uninterrupted productivity and eliminating system-wide halts during maintenance operations.
Data Source
AI summary
A processing system capable of increasing an operating time of the processing system is provided. The processing system includes a vacuum transfer module, a plurality of processing modules, a plurality of load-lock modules, and a plurality of atmospheric transfer modules. The vacuum transfer module is configured to transfer a substrate in a pressure lower than an atmospheric pressure. The processing modules are connected to the vacuum transfer module and configured to process the substrate. The load-lock modules are connected to the vacuum transfer module. Each of the atmospheric transfer modules is connected to at least one of the load-lock modules and configured to transfer the substrate in an atmospheric environment.