Load lock door assemblies, load lock apparatus, electronic device processing systems, and methods
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Solution Overview
Problem
Conventional load lock door assemblies in electronic device processing systems are prone to particle contamination and are difficult to open, requiring high opening force.
Innovation Solution
A load lock door assembly with a door support assembly that includes pivot members, a door support bracket, separator side actuators, and pivot side actuators, allowing the door to be separated from a sealing surface and pivoted for easier opening, reducing contamination and opening force.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high opening force capability is provided to overcome door sealing resistance, then the door can be opened reliably, but particle contamination increases and operation becomes difficult
Solution Approach 1:
The door opening action is segmented into two distinct phases: first the separator actuator moves the door laterally away from the sealing surface to break the seal, then the pivot actuator rotates the door to the open position. This segmentation allows the door to be opened without applying excessive force that would generate particles, while still achieving reliable opening.
Solution Approach 2:
The separator actuator serves as an intermediary mechanism that first breaks the seal between the door and sealing surface before the main pivot action opens the door. This intermediary step reduces the direct force required during opening and minimizes particle generation from friction and contact.
2Reliability
If high opening force capability is provided to overcome door sealing resistance, then the door can be opened reliably, but the operation becomes complex and difficult
Solution Approach 1:
The door opening operation is divided into two automated sequential steps: lateral separation followed by pivoting. This segmentation simplifies the control logic and makes the operation more reliable while reducing the complexity of manual intervention required.
Solution Approach 2:
The door assembly performs its own separation and opening operations through the integrated separator and pivot actuators without requiring external manual force or complex operational procedures. The system serves itself by automatically executing the two-step opening sequence.
3Reliability
If the door maintains continuous contact with the sealing surface, then sealing is effective, but particle contamination occurs during opening
Solution Approach 1:
The door operation is segmented into a sealing phase (continuous contact) and an opening phase (separated contact). During normal operation, the door maintains continuous contact for effective sealing. During opening, the separator actuator first creates a gap to break the seal, then the pivot actuator opens the door, minimizing particle generation from friction.
Solution Approach 2:
Before the door is opened, the separator actuator performs a preliminary action by moving the door laterally away from the sealing surface. This preliminary separation prevents direct friction and particle generation during the subsequent pivot opening action, while maintaining sealing effectiveness during closed operation.
Data Source
AI summary
A load lock door assembly with side actuation is disclosed. Load lock door assembly includes a load lock door and a door support assembly coupled thereto. Door support assembly includes one or more pivot members pivotable relative to one or more sides of the load lock body, a door support bracket coupled to the load lock door, one or more separator side actuators coupled between the door support bracket being actuatable to separate the load lock door from a sealing surface, and one or more pivot side actuator operable to pivot the load lock door above or below the load lock entry. Load lock apparatus with side actuation, systems including one or more load lock door assemblies with side actuation, and methods of operating load lock door assemblies are provided, as are numerous other aspects.