Load Lock Elevation Shaft Vacuum Evacuation
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Solution Overview
Problem
Load lock devices face challenges in achieving a high degree of vacuum due to the difficulty in incorporating large-diameter exhaust ports, which increases the device's size and complexity, especially when multiple ports are required for a low-impurity environment in semiconductor processing.
Innovation Solution
The design incorporates two vertically-extended elevation shaft members connected to a holding unit, with a pressure regulating mechanism using gate valves and vacuum pumps to evacuate the container through strategically positioned openings, allowing for a high degree of vacuum with a simple configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a large-diameter exhaust port is installed to achieve high vacuum, then vacuum efficiency is improved, but device size increases
Solution Approach 1:
The exhaust function is segmented into multiple exhaust ports instead of using a single large-diameter port. The patent employs multiple smaller exhaust ports distributed around the container to achieve the required vacuum efficiency while maintaining a compact device size. This segmentation allows the vacuum pump to effectively evacuate the chamber without requiring a large central exhaust opening that would interfere with the elevation rod or increase overall device dimensions.
2Productivity
If multiple exhaust ports are used to achieve high vacuum, then vacuum efficiency is improved, but device complexity increases
Solution Approach 1:
The elevation shaft members are designed to serve dual functions: supporting the load lock chamber during vertical movement and providing mounting structures for the exhaust ports. The exhaust ports are integrated into the elevation shaft assembly, allowing these components to perform both mechanical support and vacuum evacuation functions simultaneously. This multi-functionality reduces device complexity by eliminating separate dedicated exhaust port structures.
3Productivity
If a large-diameter exhaust port is installed in the container, then vacuum efficiency is improved, but the elevation rod connection becomes difficult
Solution Approach 1:
Instead of placing exhaust ports in the horizontal plane where they would conflict with the central elevation rod connection, the patent positions exhaust ports in the vertical dimension along the elevation shaft members. This dimensional relocation allows the exhaust ports to be arranged around the elevation rod without interfering with its connection to the load lock chamber, thereby maintaining both vacuum efficiency and ease of elevation rod installation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables rapid achievement of a high vacuum state while maintaining a compact and straightforward device structure, preventing the device from becoming overly large and complex, thus enhancing processing efficiency in semiconductor wafer handling.
Implementation Method 1
a pressure regulating mechanism configured to vacuum-evacuate the container through the opening of the container
Data Source
AI summary
Provided is a load lock device which includes: a container with an opening formed therein and configured to be selectively maintained at an atmospheric environment and a vacuum atmosphere; a holding unit arranged within the container and configured to hold objects to be processed; an elevation mechanism configured to vertically move the holding unit; and a pressure regulating mechanism configured to vacuum-evacuate the container through the opening of the container. The elevation mechanism includes at least two vertically-extended elevation shaft members connected to the holding unit; and a drive unit configured to vertically move the elevation shaft members. The elevation shaft members are arranged opposite each other with the opening interposed therebetween.