Load-Lock Interface Layout for Flexible Substrate Transfer
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Solution Overview
Problem
Existing substrate processing apparatus designs require changes in the depressurization part's size and layout when varying the number of load-lock modules, leading to increased costs and reduced design flexibility.
Innovation Solution
A substrate processing apparatus with a variable number of load-lock chambers in the load-lock module, connected through a tubular fitting module with different width dimensions, allowing for flexible integration with a vacuum transfer module without altering the vacuum transfer module's design.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the number of load-lock modules is increased to improve throughput, then productivity increases, but the device complexity and manufacturing cost increase due to required changes in vacuum transfer module design
Solution Approach 1:
The system is divided into independent modular components: the vacuum transfer module remains fixed while load-lock modules can be independently added or removed. The tubular fitting module acts as a standardized interface that segments the connection system, allowing flexible configuration without redesigning the entire vacuum transfer module.
Solution Approach 2:
The tubular fitting module serves multiple functions: it provides a standardized connection interface, maintains vacuum integrity, and accommodates variable numbers of load-lock modules. This universal interface allows the same vacuum transfer module design to work with different configurations of load-lock modules.
2Adaptability or versatility
If the number of load-lock modules is varied to meet different processing needs, then adaptability improves, but manufacturing cost increases due to redesign requirements
Solution Approach 1:
The tubular fitting module is pre-designed with a standardized interface that anticipates future variations in load-lock module configuration. This preliminary design establishes a fixed vacuum transfer module that can accommodate different numbers of load-lock modules without requiring subsequent redesign or remanufacturing.
Solution Approach 2:
The system design allows dynamic reconfiguration of the number of load-lock modules while maintaining a static, standardized vacuum transfer module. The tubular fitting module provides the flexible connection point that enables this dynamic adaptation without changing the core vacuum transfer module design.
3Adaptability or versatility
If the vacuum transfer module design is changed to accommodate different numbers of load-lock modules, then adaptability improves, but the loss of time for redesign and remanufacturing increases
Solution Approach 1:
By segmenting the system into a fixed vacuum transfer module and variable load-lock modules connected through standardized tubular fittings, the design eliminates the need for time-consuming redesigns. The standardized interface allows quick reconfiguration by simply adding or removing load-lock modules rather than redesigning the entire system.
Data Source
AI summary
A substrate processing apparatus includes one or more substrate processing modules; a vacuum transfer module connected to the one or more substrate processing modules; and a load-lock module including at least three load-lock chambers arranged along a first horizontal direction. A tubular fitting module is disposed between the vacuum transfer module and the load-lock module, and the tubular fitting module has a first opening and a second opening. The first opening is connected to the load-lock module, and the second opening is connected to the vacuum transfer module. The first opening has a first length in the first horizontal direction, the second opening has a second length in the first horizontal direction, and the first length is larger than the second length. A transfer mechanism transfers a substrate between the one or more substrate processing modules and the load-lock module through the tubular fitting module.