Load-Lock Interior Conveyor for LCD Substrate Transfer
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Solution Overview
Problem
The existing apparatuses for liquid crystal display (LCD) device fabrication face inefficiencies due to the time-consuming transfers between conveyors and cassettes, which disrupt the process flow and reduce throughput.
Innovation Solution
Incorporating an interior conveyor system within the load-lock chamber of the apparatus, allowing direct transfer of substrates between exterior conveyors and process chambers, eliminating the need for external cassettes and robots, thereby streamlining the substrate handling process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If substrates are transferred between conveyors and cassettes using storing units and robots, then substrate handling is enabled, but process time increases and throughput decreases
Solution Approach 1:
The invention extracts and eliminates the storing unit and robot components from the substrate handling system. By removing these intermediate transfer mechanisms, substrates are transferred directly between the exterior conveyor and load-lock chamber, thereby eliminating the time-consuming transfer steps and improving throughput while maintaining substrate handling capability.
2Adaptability or versatility
If storing units and robots are used for substrate transfer, then substrate exchange is possible, but total process time increases
Solution Approach 1:
The invention implements continuous substrate transfer by establishing a direct conveyor path from the exterior conveyor through the load-lock chamber to the process chamber. This eliminates the intermittent stop-and-transfer operations required by robot-based systems, maintaining continuous useful action and reducing total process time while preserving substrate exchange capability.
3Ease of operation
If exterior conveyor and storing unit are used, then substrate supply is enabled, but device complexity increases
Solution Approach 1:
The invention merges the substrate supply function directly into the load-lock chamber by integrating the interior conveyor within the chamber. This consolidation eliminates the need for separate storing units and multiple robots, reducing device complexity while maintaining the substrate supply capability through the integrated conveyor system.
Data Source
AI summary
An apparatus for a liquid crystal display device includes: a process chamber for treating a substrate; a load-lock chamber having an interior conveyor; and a transfer chamber connected to the process chamber and the at least one load-lock chamber, the transfer chamber having a substrate-transferring means.