Load Lock Nesting in Substrate Transfer Module
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Solution Overview
Problem
Conventional substrate processing apparatuses face an increased installation area due to the expansion of modules, which compromises productivity despite enhanced processing capabilities.
Innovation Solution
The substrate processing apparatus incorporates at least a part of the load lock module within the transfer module, allowing for a reduced footprint by integrating load lock chambers between the transfer and processing modules, thereby maintaining processing capability while minimizing the installation area.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the process module and load lock module are disposed separately outside the transfer module, then the maintenance accessibility is improved, but the installation area increases
Solution Approach 1:
The load lock module is disposed inside the transfer module, utilizing the internal space of the transfer module to house the load lock chamber. This nesting arrangement reduces the overall installation area while maintaining the functional separation between modules through internal partitioning and accessible maintenance paths.
2Area of stationary object
If the load lock module is integrated inside the transfer module, then the installation area is reduced, but the maintenance accessibility deteriorates
Solution Approach 1:
The transfer module is divided into distinct functional regions: a transfer chamber for substrate transfer and a load lock chamber for atmosphere switching. This segmentation allows the load lock module to be integrated inside the transfer module, reducing installation area while maintaining independent access and maintenance capabilities for each functional region through separate access paths.
3Productivity
If the transfer path is shortened by integrating modules, then the productivity is improved, but the device complexity increases
Solution Approach 1:
The load lock module and transfer module are merged into a single integrated structure where the load lock chamber is positioned inside the transfer module. This merging shortens the transfer path between substrate processing and transfer operations, improving productivity while managing complexity through modular design that allows independent operation of each functional component.
Data Source
AI summary
A substrate processing apparatus includes a substrate processing part configured to process a substrate under a vacuum atmosphere, a substrate transfer part connected to the substrate processing part and configured to transfer the substrate under an air atmosphere, and a load lock part disposed between the substrate processing part and the substrate transfer part and configured to switch between the air atmosphere and the vacuum atmosphere. At least a part of the load lock part is disposed inside the substrate transfer part.