Load Lock Chamber Layout for In-Situ Substrate Alignment and Inspection
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Solution Overview
Problem
The existing substrate treatment processes are inefficient due to complex transfer sequences and increased time required for notch alignment and vision inspection, which reduces Unit Production Per Hour (UPEH) efficiency and complicates the structural layout of load lock chambers.
Innovation Solution
A substrate treating apparatus with a rotating body in the load lock chamber that integrates both alignment and vision inspection capabilities, utilizing a dual-chamber design with rotational supporters and stationary supporters for efficient notch alignment and surface inspection, allowing these processes to be performed during chamber pumping and purge times.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If substrate alignment and vision inspection are performed in separate chambers (alignment chamber and vision chamber), then the inspection functions are dedicated and reliable, but the transfer sequence becomes complex and the time required for transfer increases
Solution Approach 1:
The patent combines the alignment inspection unit and vision inspection unit into a single load lock chamber. The alignment inspection unit aligns the substrate notch, while the vision inspection unit inspects the substrate surface. By merging these functions in one chamber, the patent eliminates the need for complex transfers between separate chambers, thereby reducing transfer time while maintaining dedicated inspection functions through separate inspection units within the same chamber.
2Loss of time
If alignment unit and inspection unit are installed in load lock chamber, then transfer time is reduced, but the structural complexity of the load lock chamber increases
Solution Approach 1:
The load lock chamber is designed to serve multiple functions: it acts as a pressure transition chamber and simultaneously houses both the alignment inspection unit and vision inspection unit. This multi-functional design allows the chamber to perform alignment, inspection, and pressure regulation without requiring separate dedicated chambers for each function, thereby reducing overall system complexity while maintaining comprehensive substrate processing capabilities.
3Manufacturing precision
If substrates are transferred one by one through fixed movement path, then transfer precision is maintained, but the Unit Production Per Hour (UPEH) efficiency decreases
Solution Approach 1:
The patent enables continuous substrate processing by performing alignment inspection and vision inspection simultaneously within the load lock chamber while pressure regulation occurs. This continuous operation eliminates idle transfer time between separate chambers, allowing substrates to be processed in sequence without interruption, thereby improving UPEH efficiency while maintaining transfer precision through the established fixed movement path and robotic transfer system.
Data Source
AI summary
Provided is an apparatus for treating a substrate, the apparatus including: an equipment front end module including a first transfer robot for transferring a substrate; a transfer chamber including a second transfer robot for transferring a substrate; and a load lock chamber disposed on a transfer path along which a substrate is transferred between the transfer frame and the transfer chamber, in which the load lock chamber includes: a housing including an upper chamber having an upper space, and a lower chamber positioned below the upper chamber and having a lower space; a first rotational supporter for supporting and rotating a substrate located in the upper space; and a second rotational supporter for supporting and rotating a substrate located in the lower space, and the first rotational supporter and the second rotational supporter are used for both an alignment inspection of a substrate and a vision inspection of a substrate.