Load Lock Chamber Vacuum Mass Measurement for Sample Accuracy
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Solution Overview
Problem
Highly accurate mass measurement of a sample is costly due to the need to account for environmental parameters such as air pressure, humidity, and mechanical vibrations.
Innovation Solution
A sample related system incorporating a vacuum chamber and load lock chamber with pressure control, mechanically isolated from the environment, which includes a mass measurement unit for precise mass determination within a controlled vacuum level.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If mass measurement is performed in a normal environment taking into account environmental parameters, then measurement accuracy is improved, but system cost increases
Solution Approach 1:
The patent applies the inert environment principle by creating a vacuum environment in the load lock chamber. The mass measurement is performed in a vacuum where environmental parameters such as air pressure, humidity, and mechanical vibrations are naturally eliminated, providing a stable measurement environment without requiring complex compensation systems for each parameter.
Solution Approach 2:
The patent segments the measurement system into two independent parts: a vacuum system (load lock chamber) and a measurement system (mass measurement unit). This segmentation allows the measurement unit to operate in a controlled vacuum environment while the vacuum system handles environmental control separately, reducing the complexity of integrating multiple environmental compensation systems into a single measurement device.
2Measurement precision
If environmental parameters are accurately measured and compensated, then mass measurement accuracy is improved, but device complexity increases
Solution Approach 1:
Instead of measuring and compensating for environmental parameters, the patent eliminates the harmful environmental factors by operating in a vacuum environment. This removes the need for multiple sensors and compensation algorithms for air pressure, humidity, temperature, and vibrations, significantly reducing system complexity while maintaining high measurement accuracy.
3Reliability
If load lock chamber is mechanically isolated from environment, then measurement stability is improved, but system complexity increases
Solution Approach 1:
The patent uses segmentation by separating the measurement chamber (load lock) from the external environment through a mechanical isolation structure. This allows the measurement unit to operate in a stable, isolated vacuum environment while the isolation structure handles only the boundary conditions, simplifying the overall design compared to a fully integrated system that would need to accommodate environmental variations throughout.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables cost-effective and highly accurate mass measurement by isolating the sample from environmental factors, reducing electromagnetic interference, and maintaining consistent pressure and temperature, thereby enhancing measurement accuracy and repeatability.
Implementation Method 1
controlling, by a load lock chamber pressure control unit of the load lock chamber, a pressure within the load lock chamber so that during each point of time of the at least one point in time the load lock chamber is at a load lock chamber vacuum level
Data Source
AI summary
A sample related system that includes a vacuum chamber, a load lock chamber that includes a first port that is interfaces with a first environment having a first pressure; a second port that interfaces with a second environment that comprises the vacuum chamber; a load lock chamber pressure control unit that is configured to control a pressure within the load lock chamber; and a mass measurement unit that is configured measure a mass of the sample, during at least one point in time, wherein during each point of time of the at least one point in time the load lock chamber is at a load lock chamber vacuum level. The load lock chamber is mechanically isolated from an environment of the sample related system. The vacuumed chamber is for performing a sample related operations elected out of sample evaluation or sample processing.