Load Port Door Compulsory Closing Mechanism
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Solution Overview
Problem
The increasing diameter of wafers in semiconductor manufacturing poses challenges in tightly closing wafer accommodating vessels due to higher elastic force of retainers, leading to issues with the door opening and closing mechanism, where the door member tends to tilt and fail to fully close the aperture section, resulting in a gap and difficulty in achieving a tightly closed state.
Innovation Solution
A compulsory closing mechanism is introduced in the load port, which includes a cylinder, rod, and roller system to press the door member against the aperture section, ensuring it fully closes, even when the existing door opening and closing mechanism fails to overcome the increased elastic force, allowing for tight closure without modifying the existing mechanism.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Volume of moving object
If the diameter of wafers is increased to accommodate larger semiconductor devices, then the manufacturing capability is improved, but the door member tilts and fails to fully close the aperture section due to higher elastic force of retainers
Solution Approach 1:
The closing function is segmented into two independent mechanisms: the original door opening and closing mechanism for general operation, and a new compulsory closing mechanism for ensuring full closure. This segmentation allows each mechanism to specialize in its function without interfering with the other.
Solution Approach 2:
The compulsory closing mechanism acts as an intermediary that intervenes when the door member fails to fully close due to high retainer elastic force. It provides the additional closing force needed to overcome the resistance from retainers holding large-diameter wafers.
2Stability of the object's composition
If the elastic force of retainers is increased to stably retain larger diameter wafers, then the wafer retention stability is improved, but the door member cannot be fully pressed against the aperture section
Solution Approach 1:
The system dynamically adapts to different wafer sizes and retainer forces. The compulsory closing mechanism is activated when needed to provide additional closing force, allowing the system to maintain reliable closure across varying conditions of wafer size and retainer elastic force.
Solution Approach 2:
The compulsory closing mechanism performs a preliminary assessment of the closing state and intervenes only when the door member fails to fully close. This preliminary action approach ensures that the additional closing force is applied only when necessary, maintaining wafer retention stability while ensuring closure reliability.
3Adaptability or versatility
If the door member size is increased to match larger aperture sections for bigger wafers, then the adaptability is improved, but the weight and complexity of the door opening and closing mechanism increases
Solution Approach 1:
The compulsory closing mechanism serves multiple functions: it provides additional closing force for large-diameter wafers, ensures full closure of the aperture section, and can compensate for variations in retainer elastic force. This multi-functionality increases adaptability without requiring complete redesign of the door member.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The compulsory closing mechanism effectively ensures the wafer accommodating vessel can be tightly closed, even with larger diameter wafers, by moving the door member to the correct position, eliminating the gap and ensuring secure closure without altering the existing door opening and closing mechanism.
Implementation Method 1
A compulsory closing mechanism is introduced in the load port, which includes a cylinder, rod, and roller system to press the door member against the aperture section
Data Source
AI summary
A load port including a frame having an opening, a vessel receiving table that receives the wafer vessel, a door removably attached to the opening, a door opening and closing mechanism that opens and closes the door, and a closing mechanism that exerts force on the door when the door opening and closing mechanism closes the door.