Load Port Door Mechanism With Single-Actuator Tilt-and-Slide Motion
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Solution Overview
Problem
Existing semiconductor fabrication processes face challenges with increased actuator size and complexity due to the need for separate actuators for sliding and vertical movement of load port module doors, which can lead to inefficiencies and increased molecular contaminants.
Innovation Solution
A single actuator mechanism that enables simultaneous tilting and sliding movement of the load port module door, utilizing a linear movement assembly and tilting rotator to minimize actuator size and optimize door opening and closing operations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If separate actuators are used for sliding and vertical movement of the door, then the door can be moved independently in each direction, but the actuator size and system complexity increase
Solution Approach 1:
The patent combines two separate actuators (sliding actuator and vertical actuator) into a single integrated actuator that performs both sliding and vertical movements. This merging reduces the number of components, simplifies the actuator system, and decreases overall complexity while maintaining the capability to move the door in multiple directions independently through a unified control mechanism.
2Ease of operation
If separate actuators are used for sliding and vertical movement of the door, then each movement can be controlled independently, but the space requirements increase
Solution Approach 1:
By merging the sliding and vertical actuators into a single integrated unit, the patent significantly reduces the space required for actuator installation. The unified actuator occupies less area compared to two separate actuators, while still providing independent control over both sliding and vertical door movements through its integrated mechanism.
3Ease of operation
If multiple actuators are used for door movement, then comprehensive door control is achieved, but the risk of molecular contaminants increases
Solution Approach 1:
The patent reduces the number of actuators from two to one, thereby minimizing the number of potential contamination sources. By consolidating the control functions into a single actuator with fewer moving parts and seals, the system generates fewer molecular contaminants while maintaining comprehensive door control capability through its multi-axis movement design.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution reduces the need for multiple actuators, minimizes space requirements, and enhances cleanliness by reducing the risk of molecular contaminants during wafer transfer, thereby improving semiconductor yield.
Implementation Method 1
an elastic assembly configured to provide an elastic restoring force in a direction in which the door assembly is opened between the linear movement assembly and the frame portion
Data Source
AI summary
A opening and closing apparatus of a load port module includes: a load port assembly including a mount on which a front opening unified pod (FOUP) is disposed, and a support that is arranged in a vertical direction with respect to the mount, and has an opening formed laterally with respect to the FOUP; a door assembly configured to selectively open and close the opening; and an opening and closing operator configured to open and close the door assembly on the load port assembly, wherein the opening and closing operator is configured to open the door assembly by tilting the door assembly at a set angle, and then linearly moving the door assembly.