Load Port Door Positioning to Prevent FOUP Contamination
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Solution Overview
Problem
The existing load port designs for wafer conveyance systems risk contaminating the surrounding environment due to contact between the door unit and the FOUP, leading to scattering of fragments and potential oxidation of wafer surfaces.
Innovation Solution
The load port design incorporates a door configuration where the container-side end surface of the door is positioned closer to the conveyance space than the seal member, preventing contact with the lid member and utilizing gas injection and discharge units to maintain a nitrogen atmosphere, ensuring cleanliness and preventing atmospheric air from entering the conveyance space.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the door unit protrudes from the casing towards the FOUP, then the door can effectively seal the opening portion, but the door contacts the FOUP when the FOUP is moved closer, causing scattering of fragments and contamination
Solution Approach 1:
The door's container-side end surface is positioned in a different spatial dimension (closer to the conveyance space) than the seal member's container-side end portion, creating a dimensional offset that prevents contact between the door and FOUP while maintaining sealing effectiveness through the seal member
2Reliability
If the door is positioned closer to the FOUP for better sealing, then sealing performance improves, but contact between the door and lid member occurs causing fragment scattering
Solution Approach 1:
The seal member acts as an intermediary element between the door and the FOUP, allowing the door to be positioned optimally for sealing while the seal member absorbs the contact interface, preventing direct contact between the door and FOUP that would cause fragment scattering
Data Source
AI summary
A load port including: a base as part of a wall partitioning a transportation space from an external space; an opening provided to the base; a door configured to open and close the opening and securing a lid to, and releasing a lid from, a container containing contents; and a first seal member for sealing the space between the base and the container. At least some of the container-side end surface of the door is located nearer to the transportation space than the container-side end part of the first seal member. The load port can keep a surrounding space clean when a FOUP is connected to a casing.