Load Port Door Seal Mechanism for Airtight Contamination Control

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Solution Overview

Problem

Conventional load ports lack seals between the frame and the door, leading to inefficient maintenance of environmentally-controlled atmospheres, resulting in leakage, increased costs, and contamination due to gas leaks and particle generation.

Innovation Solution

A seal mechanism with a base portion, a sealing portion, and a retaining portion is integrated into the load port door, creating an airtight seal between the door and the frame using a threshold sealing force, reducing the force requirements of the door actuator and allowing for the use of cheaper materials while preventing seal displacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a seal mechanism is added between the load port door and frame, then environmental control is improved and leakage is reduced, but device complexity increases

Engineering Contradiction:
Improveenvironmental controlVSAvoiddevice complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The seal mechanism integrates multiple functions into a single component structure. The base portion couples to the groove, the sealing portion creates the airtight seal, and the retaining portion pushes against the door edge - all in one unified seal component that reduces overall system complexity while maintaining environmental control

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The seal is divided into three distinct functional portions: a base portion for coupling to the groove, a sealing portion for creating the airtight seal, and a retaining portion for pushing against the door edge. This segmentation allows each portion to be optimized for its specific function while working together as an integrated solution

Inventive Principle:
Principle #1Segmentation

2Reliability

If a traditional seal requiring high sealing force is used, then sealing effectiveness is improved, but material consumption and cost increase

Engineering Contradiction:
Improvesealing effectivenessVSAvoidmaterial consumption
Core Design Contradiction:
ReliabilityVSLoss of substance

Solution Approach 1:

The seal mechanism changes the sealing parameter from requiring high force compression to utilizing a threshold sealing force that activates the retaining portion. This parameter change allows effective sealing with reduced material consumption and lower actuator force requirements

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The retaining portion acts as an intermediary mechanism that translates the threshold sealing force into a pushing action against the door edge. This intermediary function creates the necessary seal without requiring excessive force, reducing both material consumption and actuator requirements

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The seal mechanism effectively reduces leakage, minimizes contaminant escape, and simplifies installation by maintaining an airtight seal with lower force requirements, reducing material consumption and operational costs while ensuring proper containment of contaminants.

Implementation Method 1

The sealing portion is configured to create an airtight seal between the load port door and a sealing surface of a frame of a load port responsive to a threshold sealing force being applied against the sealing portion

Methodology Applied
Scientific EffectElasticity: Elasticity

Implementation Method 2

A surface of the retaining portion is configured to push against the edge surface of the load port door responsive to the threshold sealing force being applied against the sealing portion

Methodology Applied
Scientific EffectMechanical Force: Mechanical Force

Data Source

PatentUS11993978B2Seal mechanism for load port doors
Publication Date: 2024.05.28 APPLIED MATERIALS INC
  • US11993978B2 patent drawing
  • US11993978B2 patent drawing
  • US11993978B2 patent drawing

AI summary

The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by an edge surface of a first component. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to a threshold sealing force being applied against the sealing portion. The seal further includes a retaining portion substantially perpendicular to the base portion. A surface of the retaining portion is configured to push against the edge surface of the first component responsive to the threshold sealing force being applied against the sealing portion.