Two-Sided Load Port Seal for Low-Compression Airtight Docking
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Solution Overview
Problem
Current load ports in electronic device manufacturing systems lack efficient seal mechanisms, requiring high compression forces to maintain an environmentally-controlled atmosphere, which increases material and operational costs and complicates design and fabrication.
Innovation Solution
A two-sided seal mechanism is introduced, featuring a first contact point that engages with the load port door and a second contact point that engages with the substrate carrier, reducing the need for high compression forces and allowing for the use of cheaper materials and simpler designs, while maintaining an airtight seal.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a traditional single-sided seal mechanism is used in load ports, then the structure is simple, but high compression forces are required to maintain the environmentally-controlled atmosphere
Solution Approach 1:
The seal mechanism is segmented into two separate sealing interfaces: a first seal between the load port door and frame, and a second seal between the substrate carrier and frame. This segmentation distributes the sealing function across multiple contact points, reducing the compression force required at each interface while maintaining overall seal effectiveness.
Solution Approach 2:
The load port frame acts as an intermediary element between the load port door and the substrate carrier. The frame provides a stable mounting structure for both seals, enabling the door and carrier to seal independently against the frame rather than requiring direct contact between them, thus reducing the compression force burden.
2Reliability
If high compression forces are applied to maintain the environmentally-controlled atmosphere, then the seal effectiveness is improved, but material and operational costs increase
Solution Approach 1:
By segmenting the sealing function into two separate seals mounted on the frame, each seal operates at lower compression forces. This reduces wear and tear on sealing materials, extending their service life and reducing replacement frequency, thereby lowering operational costs while maintaining reliable sealing.
Solution Approach 2:
The invention changes the operational parameters of the seal system by distributing the sealing load across two interfaces rather than one. This parameter change allows each seal to function at optimal lower compression levels, improving material efficiency and reducing operational costs while maintaining atmospheric integrity.
3Reliability
If high compression forces are used for sealing, then the atmospheric seal is maintained, but the service life of the seal is reduced
Solution Approach 1:
The segmentation of the sealing function into two separate seals reduces the compression force burden on each individual seal. This reduction in stress and strain extends the service life of both seals while maintaining the required atmospheric seal through their combined action at different contact points.
4Device complexity
If traditional seal mechanisms are used, then the design is simple, but tight spaces cannot be effectively sealed
Solution Approach 1:
The invention utilizes the frame structure to mount seals at multiple spatial dimensions and orientations. The first seal is mounted on the door side of the frame while the second seal is mounted on the carrier side, effectively using the frame's thickness and spatial arrangement to achieve sealing in tight spaces that would be inaccessible to traditional single-sided seal designs.
Data Source
AI summary
The disclosure describes devices and systems for a two-sided seal for a load port, and methods for using said seal. A factory interface for an electronic device manufacturing system can include a load port for receiving a substrate carrier. The load port can include a frame adapted for connecting the load port to a factory interface, the frame comprising a transport opening. The load port can also include a seal coupled to the frame. The seal can include a first contact point configured to engage with a load port door when the load port door is in a first position, and configured to disengage with the load port door when the load port door is in a second position and a second contact point configured to engage with a front of a substrate carrier when the substrate carrier is docked on the load port.