Load Port Flange Clamp Engagement Detection
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Solution Overview
Problem
Conventional load port apparatuses face leakage issues due to deformation or slight displacement of wafer transportation containers, leading to ineffective engagement with flange clamp units and subsequent gas leakage during lid opening.
Innovation Solution
A load port apparatus equipped with a detection unit that classifies engagement operations as normal or abnormal, preventing gas leakage by ensuring proper engagement between the flange clamp unit and the wafer transportation container's flange, utilizing a drive section with distinct operation directions and a coverage unit for miniaturization and protection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the flange clamp unit is operated to engage with the flange, then the connection between wafer transportation container and frame opening is established, but deformation or displacement of the container prevents normal engagement causing gas leakage
Solution Approach 1:
The detection unit performs preliminary detection of the engagement state before the engagement operation is completed. By detecting whether the engagement section has successfully engaged with the flange groove in advance, the system can identify abnormal engagement operations before they cause gas leakage, allowing for preventive action to be taken.
Solution Approach 2:
The detection unit provides real-time feedback on the engagement state to the control unit. When abnormal engagement is detected, the control unit receives this feedback and can adjust the operation accordingly, such as preventing lid opening or repositioning the container, thereby preventing gas leakage caused by improper engagement.
2Ease of operation
If the lid is opened to take out wafers, then wafer access is enabled, but gas leakage occurs if engagement is abnormal
Solution Approach 1:
The detection unit performs preliminary detection of the engagement state before allowing the lid opening operation to proceed. By checking whether the engagement section has successfully engaged with the flange groove beforehand, the system ensures that the connection is secure before enabling wafer access, preventing gas leakage during lid opening.
Solution Approach 2:
The detection unit provides feedback on the engagement state to control the lid opening operation. When normal engagement is detected, the system permits lid opening for wafer access; when abnormal engagement is detected, the lid opening is prevented, thereby maintaining connection integrity while still enabling convenient wafer access when conditions are appropriate.
3Volume of moving object
If the engagement section is designed to engage from above or side, then miniaturization is achieved, but precise positioning becomes more difficult
Solution Approach 1:
The detection unit acts as an intermediary between the engagement section and the control system. It detects the engagement state by monitoring whether the engagement section has successfully engaged with the flange groove, providing critical positioning information without requiring complex mechanical positioning mechanisms. This allows for miniaturization while maintaining engagement precision through sensor-based feedback.
Data Source
AI summary
A load port apparatus connects a main opening of a wafer transportation container to a frame opening. The apparatus includes an installation unit, a frame unit, a flange clamp unit, and a detection unit. The installation unit includes an installation table configured to install the container and relatively move to the frame opening. The frame unit is upright upward from the installation unit and includes the frame opening. The flange clamp unit includes an engagement section and a drive section. The engagement section is engageable with a flange surrounding an outer circumference of the main opening. The drive section drives the engagement section to carry out an engagement operation and a separation operation. The detection unit detects the engagement operation by the flange clamp unit with classification into a normal engagement operation and an abnormal engagement operation.