Load Port Positioning for Parallel FOUP Transfer in AMHS
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Solution Overview
Problem
Existing automated material handling systems (AMHS) face efficiency decreases as the number of works-in-progress (WIP) increases, leading to delays and 'traffic jams', which reduce manufacturing efficiency and increase costs.
Innovation Solution
A positioning apparatus is introduced that operates in conjunction with a load port to efficiently transfer wafer storage containers by moving them horizontally and vertically, allowing a single AMHS vehicle to perform both loading and unloading operations, thereby reducing transfer time and vehicle traffic.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional AMHS is used to transport wafer storage containers, then the system can perform material handling operations, but the delivery time accuracy deteriorates and traffic jams occur as the number of works-in-progress increases
Solution Approach 1:
The system divides the material handling function into two separate entities: the AMHS vehicle for transport and the positioning apparatus for precise positioning and transfer operations. This segmentation allows each component to specialize in its function, improving overall system reliability and reducing traffic congestion by enabling parallel operations.
Solution Approach 2:
The positioning apparatus acts as an intermediary device between the AMHS vehicle and the load port. It receives containers from the vehicle, positions them precisely, and transfers them to the load port, thereby improving delivery time accuracy and reducing the burden on the AMHS vehicle to perform complex positioning maneuvers.
2Productivity
If multiple AMHS vehicles are used to handle loading and unloading operations, then the system can maintain higher productivity, but the device complexity and cost increase
Solution Approach 1:
The positioning apparatus combines multiple functions (receiving, positioning, holding, and transferring containers) into a single device. This merging eliminates the need for multiple AMHS vehicles to perform different operations, maintaining high productivity while reducing system complexity and cost.
Solution Approach 2:
The positioning apparatus is designed as a multi-functional device that can perform both loading and unloading operations. It serves as a universal interface between the AMHS vehicle and the load port, replacing the need for specialized vehicles for different operations and thereby reducing overall system complexity.
3Loss of time
If the AMHS vehicle performs both loading and unloading operations, then the vehicle traffic increases causing delays, but using additional vehicles increases cost
Solution Approach 1:
The positioning apparatus extracts the time-consuming positioning and transfer operations from the AMHS vehicle's workflow. The vehicle only needs to deliver containers to the positioning apparatus, which then handles the precise positioning and load port interface operations, thereby reducing vehicle traffic delays and improving transfer time without requiring additional vehicles.
Data Source
AI summary
Methods and systems for improving the efficiency of an automated material handling system (AMHS) include providing an apparatus operatively coupled to a load port of a processing apparatus, where the apparatus is configured to remove a first work-in-process from the load port and to move the first work-in-process along a first direction to displace the first work-in-progress from the load port while a second work-in-progress is transferred to the load port from an AMHS vehicle along a second direction that is perpendicular to the first direction, and transferring the first work-in-progress to an AMHS vehicle along the second direction. The methods and systems may be used for loading and unloading wafer storage containers, such as front opening unified pods (FOUPs), in a semiconductor fabrication facility.