Load Port Link Mechanism for Smooth Door Movement
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Solution Overview
Problem
The existing load port devices for semiconductor wafers suffer from particle generation at the connections of guide rails during door opening and closing, due to complex configurations and vibration transmission between separate driving mechanisms, leading to degraded wafer quality.
Innovation Solution
A load port device with a link mechanism that moves the door holding member from a horizontal to a vertical direction, using a single main shaft and reciprocating moving device, to smoothly open and close the FOUP door, reducing particle generation and simplifying the system configuration.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If separate driving mechanisms are provided for opening/closing the door and for hoisting, then the door can be moved in multiple directions, but the configuration becomes complicated and particles generate at the connected portion of the guide rail
Solution Approach 1:
The patent combines the opening/closing driving mechanism and the hoisting driving mechanism into a single integrated driving mechanism. This single mechanism uses one guide rail that extends in both the horizontal direction (for opening/closing) and the vertical direction (for hoisting), eliminating the need for separate driving mechanisms and their respective guide rails, thus reducing complexity and particle generation at connection points
2Adaptability or versatility
If two driving mechanisms are provided, then the door can be moved in multiple directions, but particles easily generate due to load applied to the connected portion of the guide rail
Solution Approach 1:
By merging the two separate driving mechanisms into one, the patent eliminates the connected portion between two guide rails where particles would generate due to applied load. The single guide rail design removes the interface between separate mechanisms, thereby preventing particle generation at connection points
3Ease of operation
If one of the driving mechanisms is operated, then the door can be moved in one direction, but vibration or shock is transmitted to the other driving mechanism so that particles might generate in the inside of each driving mechanism
Solution Approach 1:
The patent merges both driving functions into a single driving mechanism, eliminating the problem of vibration or shock transmission between separate mechanisms. Since there is only one driving mechanism, vibrations generated during operation do not transmit to another mechanism, preventing particle generation inside the driving mechanism
4Adaptability or versatility
If two driving mechanisms are provided, then the door can be moved in multiple directions, but the opening/closing movement is not conducted smoothly so that particles might generate in the door holding member
Solution Approach 1:
The patent combines the opening/closing and hoisting functions into a single smooth reciprocating movement of the door holding member. The unified driving mechanism ensures smooth operation without the jerky movements or miscoordination that would occur with two separate mechanisms, thereby preventing particle generation in the door holding member
Data Source
AI summary
A load port device comprises a link mechanism that has a main moving link whose one end is connected with a door holding member in a rotatable manner, a guide that bends and extends from a horizontal direction to a vertical direction and that guides one end of the main moving link, a main moving block with which the other end of the main moving link is connected in a rotatable manner and a door hoisting shaft that extends in the vertical direction and that moves the main moving block in the extending direction. The link mechanism allows the end of the main moving link to move from the horizontal direction to the vertical direction or from the vertical direction to the horizontal direction along the guide in a state that the other end of the main moving link moves to the vertical direction.