Load Port Mapping Sensor for Substrate Detection
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Solution Overview
Problem
Conventional load ports struggle to precisely and quickly detect the state of substrates, especially non-circular shapes, without increasing the size of the container or load port, as existing sensors require additional space and have low detection accuracy due to positional shifts and reflection states.
Innovation Solution
A load port with a mapping sensor integrated into a movable door that captures images of substrates by emitting light and adjusting the optical axis to avoid strong inner-wall-surface reflected light, allowing for precise detection without entering the container and accommodating various substrate shapes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a transmission-type light sensor is used to detect substrate state, then detection precision is improved, but the device complexity and space requirements increase
Solution Approach 1:
The patent replaces the complex mechanical transmission-type sensor system with a simpler reflective light sensor system. Instead of requiring the mapping device to physically enter the container and sandwich the substrate between light sources, the invention uses a light sensor that detects reflected light from the substrate surface, eliminating the need for complex mechanical positioning and entry mechanisms.
Solution Approach 2:
The invention extracts the light sensor from the movable mapping device and integrates it directly into the door structure. This separation allows the door to perform both its primary function of opening/closing the container and the secondary function of positioning the light sensor for substrate detection, thereby simplifying the overall system by removing the need for a separate, complex mapping device.
2Adaptability or versatility
If the container size is increased to accommodate rectangular substrates, then adaptability is improved, but the load port and transportation system size increase
Solution Approach 1:
The invention changes the detection parameter from requiring physical space around the substrate to using optical reflection properties. By detecting substrate state through reflected light patterns rather than physical measurement, the system can accommodate various substrate shapes (circular, rectangular, etc.) without requiring additional physical space or enlarging the container and load port dimensions.
3Measurement precision
If the mapping sensor enters the container for detection, then measurement precision is improved, but the loss of time increases due to separate door and sensor motion
Solution Approach 1:
The patent merges the door function and light sensor positioning function into a single integrated structure. The light sensor is mounted on the door such that when the door moves to open or close the container, the sensor automatically moves into the detection position. This eliminates the need for separate sensor movement mechanisms and allows simultaneous door operation and substrate detection, reducing total detection time.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise and efficient detection of substrate states, improving processing efficiency and flexibility in handling different substrate shapes without enlarging the load port or container, and reducing the need for separate motion of the door and sensor.
Implementation Method 1
an imaging portion configured to capture an image of a reflected light of the imaging light
Data Source
AI summary
A load port includes a door and a mapping sensor. The door moves upward and downward between a closing position for closing an opening connected into a container with multiple stages for placing a plurality of substrates and an opening position for opening the opening. The mapping sensor is disposed integrally with the door and detects a state of the substrates. The mapping sensor includes a light emitting portion and an imaging portion. The light emitting portion emits an imaging light toward the substrates. The imaging portion captures an image of a reflected light of the imaging light.