Three-Axis Load Port Mounting Adjustment for Safer Chamber Installation
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Solution Overview
Problem
The existing methods for adjusting the mounting position of a load port on a transfer chamber require operators to perform adjustments in an awkward posture, which is time-consuming and increases the risk of the load port tipping over during movement due to exposed adjustment bolts.
Innovation Solution
A load port mounting position adjustment mechanism that integrates X-axis, Y-axis, and Z-axis adjustment parts mounted to the upper or middle section of the wall surface, allowing for comfortable posture adjustments and preventing the load port from tipping over during movement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If adjustment bolts are provided near the lower end of the wall surface for mounting the load port, then the mounting position can be adjusted, but the operator must crawl into a recessed area to perform adjustment work, resulting in poor workability and increased operation time
Solution Approach 1:
The patent moves the adjustment mechanism from the lower end of the wall surface to the upper end, changing the spatial dimension of operation. This allows the operator to perform adjustment work in a standing posture rather than crawling into a recessed area, significantly improving ease of operation while maintaining mounting position adjustment capability
2Manufacturing precision
If height position adjustment bolts are exposed and protruded downward after mounting, then the mounting position can be adjusted, but the forklift's tines may come into contact with or get caught on the adjustment bolts, causing the load port to tip over
Solution Approach 1:
The patent extracts the adjustment bolts from the lower end position where they would interfere with forklift movement. By relocating the adjustment mechanism to the upper end of the wall surface, the protruding bolts that could cause tipping are removed from the lower region, eliminating the safety hazard while preserving the adjustment function through the upper-mounted mechanism
3Manufacturing precision
If adjustment bolts are provided at the lower end of the wall surface, then mounting position adjustment is possible, but the mounting operation takes a lot of time due to awkward posture requirements
Solution Approach 1:
By relocating the adjustment mechanism from the lower to the upper end of the wall surface, the patent enables operators to work in a standing posture, which is much faster and more efficient than crawling. This dimensional change in operation location directly improves mounting operation speed and productivity
Data Source
AI summary
A load port mounting position adjustment mechanism is capable of adjusting a mounting position of a load port on a wall surface of a transfer chamber, and includes: an X-axis adjustment part configured to adjust the position of the load port in a width direction of the wall surface; a Y-axis adjustment part configured to adjust the position of the load port in a thickness direction of the wall surface; and a Z-axis adjustment part configured to adjust the position of the load port in a height direction of the wall surface. A three-axis adjustment mechanism that integrates the X-axis, the Y-axis, and the Z-axis adjustment parts is mounted to the wall surface by using a mounting hole formed in either an upper section or a middle section of the wall surface. This improves the workability of mounting the load port to the wall surface with a high precision.


