Load Port Cleaner Using Purge Gas and Suction for Particle Removal

Solution Overview

Problem

Semiconductor load ports generate particles due to frequent friction with Front Opening Unified Pods (FOUPs), necessitating regular maintenance that is often neglected due to prioritization in maintenance work.

Innovation Solution

A load port cleaner utilizing a logistics automation system with a container structure and pipes to connect with existing purge and suction systems, performing periodic cleaning by providing purge gas and suction to remove particles from load ports.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If cleaning of load ports is pushed back due to priority in maintenance work, then other maintenance tasks can be performed first, but particle contamination in load ports increases

Engineering Contradiction:

Improvemaintenance work efficiencyVSAvoidparticle contamination

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The load port cleaner is designed to automatically clean load ports using the existing purge and suction systems without requiring manual intervention or additional installation. The device seats on the load port and uses the port's own infrastructure to perform cleaning, making maintenance proactive rather than reactive.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The load port cleaner utilizes the existing purge and suction systems of the load port for cleaning purposes, making the system multi-functional. The same infrastructure used for other port operations is leveraged to remove particles, eliminating the need for separate cleaning equipment.

Inventive Principle:

Principle #6Universality (Multi-functionality)

2Reliability

If additional cleaning equipment is installed, then cleaning effectiveness improves, but device complexity and installation requirements increase

Engineering Contradiction:

Improvecleaning effectivenessVSAvoidinstallation requirements

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The load port cleaner utilizes the existing purge and suction systems of the load port for cleaning purposes, making the system multi-functional. The same infrastructure used for other port operations is leveraged to remove particles, eliminating the need for separate cleaning equipment.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Solution Approach 2:

The load port cleaner is designed to automatically clean load ports using the existing purge and suction systems without requiring manual intervention or additional installation. The device seats on the load port and uses the port's own infrastructure to perform cleaning, making maintenance proactive rather than reactive.

Inventive Principle:

Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively cleans load ports without additional installation, ensuring consistent particle removal and maintaining cleanliness in semiconductor facilities.

Implementation Method 1

providing a purge gas from the purge port, and performing suction in the exhaust port to perform a cleaning operation, the purge gas sequentially passing through the first lower port, the first pipe, the cup, the suction cup, the second pipe and the second lower port and then exiting to the exhaust port

Methodology Applied

Scientific EffectPurge gas flow:

Implementation Method 2

performing suction in the exhaust port to perform a cleaning operation

Methodology Applied

Scientific EffectSuction: Suction

Data Source

PatentUS20250387809A1Load port cleaners and operating methods thereof

Publication Date: 2025.12.25 SAMSUNG ELECTRONICS CO LTD

AI summary

A load port cleaner is provided. The load port cleaner comprises a container including a lower plate, an upper plate, and a front plate disposed between the lower plate and the upper plate; first and second lower ports in the lower plate; a first front port in the front plate; a cup installed in the first front port, the cup including an opening exposed to the front, a first connection port, and a second connection port; a first pipe configured to connect the first lower port with the first connection port of the cup; and a second pipe configured to connect the second lower port with the second connection port of the cup.