Load Port Pressing Unit for Gas Leakage Prevention
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Solution Overview
Problem
Existing load ports face challenges in preventing gas leakage during high-pressure gas supply for purging containers, which can lead to inefficient purging and locking issues due to the floating of containers during gas supply.
Innovation Solution
A load port design incorporating a dock plate, a gas supply nozzle unit, and a pressing unit with a contact member and driving mechanism to ensure the container is securely pressed down, preventing gas leakage and facilitating efficient purging by maintaining contact between the gas supply nozzle and the container.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the supply flow velocity of the gas is increased or the supply pressure is made high to perform purge in a shorter time, then the purging efficiency is improved, but the purge port of the container may float up from the gas supply nozzle, resulting in gas leakage
Solution Approach 1:
The pressing unit applies a downward force on the container to counteract the upward floating force generated by high-pressure gas supply. This counterbalancing force allows the system to maintain both high gas supply pressure (for fast purging) and secure contact between the purge port and nozzle (for reliable gas supply).
2Reliability
If the elastic force of the elastic member is increased to prevent gas leakage, then the adhesion between the gas supply nozzle and the purge port is improved, but the container may float from the dock plate when placed on it
Solution Approach 1:
The pressing unit provides a controlled downward force that counteracts the upward force from the elastic member, preventing the container from floating on the dock plate while still allowing the elastic member to maintain sufficient adhesion for gas supply.
Solution Approach 2:
The system changes the parameter of container positioning by introducing the pressing unit that actively controls the vertical position of the container, transitioning from passive elastic force balance to active mechanical control.
3Reliability
If the lock mechanism is operated in a state in which the container floats, then the lock mechanism may idle and fail to lock properly, but increasing the elastic force to prevent floating causes the container to float from the dock plate
Solution Approach 1:
The pressing unit is activated before the lock mechanism operates to ensure the container is in the correct position. This preliminary action prevents the lock mechanism from idling and ensures reliable locking before the high-speed purging process begins.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents gas leakage and allows for faster purging by ensuring the container remains securely positioned, enhancing the adhesion between the gas supply nozzle and the container, thus maintaining the integrity of the purging process.
Implementation Method 1
When a gas with a pressure higher than the atmospheric pressure is supplied into the container to make the pressure in the container positive
Implementation Method 2
it is effective to increase the elastic force of an elastic member provided in the gas supply nozzle unit to increase the adhesion between the gas supply nozzle and the purge port
Implementation Method 3
a pressing unit provided above the dock plate and configured to press the container placed on the dock plate downward
Data Source
AI summary
A load port includes a dock plate on which a container storing a substrate is placed, a port plate, a moving mechanism configured to move the dock plate between a dock position and an undock position, a gas supply nozzle unit provided in the dock plate and configured to contact a bottom surface of the container placed on the dock plate and supply a gas into the container, and a pressing unit provided above the dock plate and configured to press the container placed on the dock plate downward. The pressing unit includes a contact member brought into contact with the container placed on the dock plate, and a driving mechanism configured to move the contact member between a first position apart from the container and a second position in contact with the container.