Load Port Purge Nozzle Collision Prevention

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Solution Overview

Problem

Conventional load port apparatuses for semiconductor factories face issues with particle generation in the cleaning gas flow channel due to movable purge nozzle components, leading to abrasion and reduced durability, as well as potential particle inflow and leakages during gas purification processes.

Innovation Solution

A load port apparatus with vertically movable pins that support the container from below, allowing the purge nozzle to connect with the purge port without excessive collision, thereby preventing particle generation and abrasion, and ensuring secure gas flow by adjusting the contact strength and position of the purge nozzle relative to the purge port.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If the purge nozzle is made movable to connect with the purge port, then the connection between purge nozzle and purge port is achieved, but particles are generated in the movable part and may inflow into the cleaning gas flow channel

Engineering Contradiction:

Improveconnection reliabilityVSAvoidparticle generation

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

Instead of making the purge nozzle movable to achieve connection, the patent inverts the approach by making the container body movable relative to the fixed purge nozzle. This inversion eliminates the need for a movable purge nozzle, thereby preventing particle generation in the flow channel while maintaining reliable connection between the purge nozzle and purge port.

Inventive Principle:

Principle #13The other way round (Inversion)

2Reliability

If the purge nozzle excessively strongly collides with the purge port during connection, then the connection is established, but abrasion of the container progresses and durability life decreases

Engineering Contradiction:

Improveconnection establishmentVSAvoiddurability life

Core Design Contradiction:

ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The patent applies beforehand cushioning by designing the movable container body to have controlled movement that prevents excessive collision strength. The guiding structure and controlled descent mechanism cushion the connection process, establishing reliable connection between the purge nozzle and purge port while preventing excessive abrasion that would reduce durability life.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

3Object-affected harmful factors

If the purge nozzle is fixed to the mount member, then particle generation from movable parts is prevented, but the purge nozzle cannot connect with the purge port without excessive collision

Engineering Contradiction:

Improveparticle generation preventionVSAvoidconnection reliability

Core Design Contradiction:

Object-affected harmful factorsVSReliability

Solution Approach 1:

The patent resolves this contradiction by inverting which component moves. The purge nozzle remains fixed to the mount member, preventing particle generation, while the container body is designed to be movable. This allows the fixed purge nozzle to reliably connect with the movable purge port without excessive collision, as the container body's movement is controlled and cushioned.

Inventive Principle:

Principle #13The other way round (Inversion)

4Ease of operation

If the container is transported by OHT and contacts the pins, then the container is positioned, but the purge nozzle may collide excessively strongly with the purge port

Engineering Contradiction:

Improvecontainer positioningVSAvoidcollision strength

Core Design Contradiction:

Ease of operationVSStrength

Solution Approach 1:

The patent applies beforehand cushioning by designing the container body to be movable and guided during the positioning process. When the container transported by OHT contacts the pins, the controlled movement and guiding structure cushion the subsequent connection between the purge nozzle and purge port, preventing excessive collision strength while maintaining ease of operation for container positioning.

Inventive Principle:

Principle #11Beforehand cushioning (Prior cushioning)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively prevents particle inflow into the cleaning gas flow channel, enhances the durability of the apparatus by reducing abrasion, and ensures secure gas purification by maintaining a controlled connection between the purge nozzle and purge port, thus maintaining cleanliness and extending the apparatus' lifespan.

Implementation Method 1

a plurality of pins configured to support the container from below by each contacting with a predetermined position of the bottom of the container, wherein the pins are relatively vertically movable to the mount member between a first position and a second position

Methodology Applied

Scientific EffectMechanical Force: Mechanical Force

Implementation Method 2

a purge nozzle configured to introduce a cleaning gas into the container mounted on the mount member via a purge port disposed on a bottom of the container

Methodology Applied

Scientific EffectGas Flow:

Data Source

PatentUS11145528B2Load port apparatus and method of mounting container

Publication Date: 2021.10.12 TDK CORP

AI summary

A load port apparatus includes a mount member, a purge nozzle, and a plurality of pins. The mount member mounts a container. The nozzle introduces a cleaning gas into the container mounted on the mount member via a purge port disposed on a bottom of the container. The pins support the container from below by each contacting with a predetermined position of the bottom of the container. The pins are relatively vertically movable to the mount member between a first position and a second position where an upper tip of each of the pins is located lower than that at the first position. The upper tip of each of the pins at the first position contacts with the predetermined position of the container. The upper tip of each of the pins at the second position contacts with the predetermined position of the container.