Load Port Door Seal Geometry for Low-Force Airtight Sealing
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Solution Overview
Problem
Conventional load ports in electronic device manufacturing systems lack effective seals between the load port door and frame, leading to leakage, contamination, and increased costs due to the need for high sealing forces and material consumption, as well as potential safety hazards from gas leaks.
Innovation Solution
A seal mechanism featuring a base portion with a notch that allows lateral flexing, coupled to a groove in the load port door, creating an airtight seal with a threshold force, reducing installation difficulty and material requirements.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a seal mechanism is added to create an airtight seal between the load port door and frame, then sealing effectiveness is improved, but device complexity increases
Solution Approach 1:
The seal is divided into two functional portions: a base portion that couples to the groove in the load port door, and a sealing portion that creates the airtight seal against the frame. This segmentation allows each portion to be optimized independently for its specific function while simplifying the overall installation process.
Solution Approach 2:
The base portion includes a notch that enables lateral flexing during installation, allowing the seal to adapt to manufacturing tolerances and fit properly in the groove without requiring precise alignment or excessive force. This dynamic flexibility simplifies installation while ensuring reliable sealing.
2Reliability
If high sealing forces are applied to ensure an airtight seal, then sealing effectiveness is improved, but loss of energy increases
Solution Approach 1:
The sealing portion is designed as a flexible element that can deform under moderate force to create an effective seal. The flexibility of the sealing portion allows it to conform to the sealing surface and maintain an airtight seal with lower applied forces compared to rigid sealing mechanisms.
Solution Approach 2:
The notch in the base portion changes the structural parameters of the seal, allowing lateral flexing that distributes the sealing force more effectively. This parameter change enables the seal to achieve adequate contact pressure for sealing while reducing the overall force requirement compared to a rigid seal design.
3Manufacturing precision
If traditional seal installation methods are used without lateral flexing capability, then manufacturing precision is maintained, but ease of manufacture deteriorates
Solution Approach 1:
The notch in the base portion provides lateral flexing capability that allows the seal to be installed in the groove without requiring precise alignment. The flexible base portion can accommodate minor variations in groove dimensions and positioning, making installation easier while still achieving proper fit and sealing effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The seal mechanism achieves airtight sealing with lower force requirements, minimizing leakage and contamination, reducing material consumption, and enhancing system safety by maintaining a controlled atmosphere.
Implementation Method 1
The base portion includes a notch in a bottom of the base portion configured to cause the base portion to laterally flex responsive to an installation force
Implementation Method 2
The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to an application of a threshold sealing force against the sealing portion
Data Source
AI summary
A seal includes a base portion configured to couple to a groove formed by a first surface of a first component. The seal further includes a sealing portion configured to create an airtight seal between the first component and a second component, The sealing portion extends laterally offset from an end of a heel of the base portion. The sealing portion includes an at least partially curved cross-section curving in a first direction from the base portion to a segment substantially parallel with the base portion and further curving in a second direction away from the base portion.