Load Port Door Seal Structure for Low-Force Airtight Sealing
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Solution Overview
Problem
Current load ports in electronic device manufacturing systems lack seals between the load port frame and the load port door, leading to inefficiencies such as leakage of environmentally-controlled atmospheres, contamination, and increased operational costs due to the need to maintain positive pressure.
Innovation Solution
A seal mechanism is introduced, comprising a base portion with a notch that allows lateral flexing during installation, and a sealing portion that creates an airtight seal between the load port door and the frame when a threshold sealing force is applied.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a seal mechanism is added between the load port frame and door, then environmental control is improved and leakage is prevented, but device complexity increases
Solution Approach 1:
The patent uses a flexible seal member with a base portion and sealing portion that can deform to conform to the groove geometry and create an effective seal. The flexible nature of the seal member allows it to adapt to surface irregularities and maintain sealing contact without requiring complex rigid sealing structures.
Solution Approach 2:
The seal member is divided into distinct functional segments: a base portion for structural support and groove engagement, and a sealing portion for creating the actual seal. This segmentation allows each part to be optimized independently for its specific function while simplifying the overall design.
2Reliability
If a traditional rigid seal is used, then sealing effectiveness is improved, but installation difficulty increases due to inability to flex during installation
Solution Approach 1:
The seal member incorporates dynamic flexibility through the notch in the base portion, allowing it to deform during installation and then return to its sealed configuration when installed. This dynamic behavior enables easy installation while maintaining effective sealing, eliminating the trade-off between rigidity and installability.
Solution Approach 2:
The flexible seal member with its notch-based deformation capability allows the sealing structure to be installed without excessive force by temporarily flexing during installation, then maintaining its sealing shape during operation.
3Reliability
If high sealing force is applied to ensure airtight seal, then sealing reliability is improved, but energy consumption increases
Solution Approach 1:
The flexible seal member naturally conforms to the sealing surface through its deformability, creating an effective seal with minimal applied force. The flexibility allows the seal to adapt to surface variations without requiring high compression forces, thereby reducing the energy needed to maintain the seal.
Solution Approach 2:
The seal design changes the mechanical parameters of the sealing interface by introducing a flexible element that can deform under low force conditions. This allows the sealing system to operate at lower force levels while maintaining sealing effectiveness, reducing the energy required for door operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The seal mechanism reduces the required sealing force, allows for easier installation, and effectively prevents leakage and contamination, thereby reducing material consumption and operational costs while maintaining a controlled atmosphere.
Implementation Method 1
The base portion includes a notch in a bottom of the base portion configured to cause the base portion to laterally flex responsive to an installation force
Implementation Method 2
The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to an application of a threshold sealing force against the sealing portion
Data Source
AI summary
The disclosure describes devices and systems for a seal, and methods for using said seal. A seal includes a base portion configured to couple to a groove formed by a first surface of a first component. The base portion includes a notch in a bottom side of the base portion configured to cause the base portion to laterally flex responsive to an installation force. The seal further includes a sealing portion extending from the base portion. The sealing portion is configured to create an airtight seal between the first component and a sealing surface of a second component responsive to an application of a threshold sealing force against the sealing portion.