Load Port Module Sensor Cleaner Pneumatic Actuation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing load port modules for semiconductor processing chambers face inefficiencies due to particle contamination, which reduces the precision of status sensors and requires manual cleaning, thereby decreasing the overall manufacturing process efficiency.
Innovation Solution
A load port module with a safety sensor and automatic sensor cleaner system that uses pneumatic operators and compressed air to detect and remove foreign matter, allowing continuous operation and preventing contamination from entering the processing chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a status sensor is used to detect particles on the load port module, then particle detection capability is improved, but the frequency of load failures and stoppages increases due to particle contamination
Solution Approach 1:
The pneumatic operator performs preliminary action by blowing compressed air through the nozzle to remove particles from the load port module surface before they can be detected by the status sensor and cause stoppages. This preventive cleaning action eliminates the need for repeated stoppages and manual cleaning operations.
Solution Approach 2:
The system implements self-service by automatically detecting particles with the status sensor and triggering the pneumatic operator to clean the load port module without human intervention. The moving plate's motion activates the pneumatic operator, creating a self-regulating system that maintains operational efficiency.
2Object-affected harmful factors
If manual cleaning of particles from the load port module is performed, then contamination is removed, but operational efficiency and productivity decrease due to stoppages
Solution Approach 1:
The patent replaces manual mechanical cleaning with an automated pneumatic system. The pneumatic operator uses compressed air flow to remove particles automatically, substituting the manual mechanical cleaning process and eliminating the associated stoppages and productivity losses.
Solution Approach 2:
Compressed air serves as an intermediary medium between the pneumatic operator and the particles on the load port module. The air flow transports particles away from the critical areas, providing an effective and non-contact cleaning mechanism that maintains operational continuity.
3Reliability
If the load port module is stopped to remove particles, then contamination is eliminated, but the efficiency of the module and manufacturing process decreases
Solution Approach 1:
The pneumatic operator enables continuous useful action by automatically removing particles during the loading process without requiring module stoppages. The system maintains continuous substrate transfer operations while eliminating contamination risks, preventing time loss and maintaining manufacturing process efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively prevents stoppages caused by foreign matter, maintaining operational efficiency by automatically removing contaminants and ensuring continuous substrate transfer into the processing chamber.
Implementation Method 1
The safety sensor may include an optical sensor to generate the stop signal based on an optical signal
Implementation Method 2
a reflector coupled to the vertical frame along a path of the second optical signal facing the light receiver, light receiver to receive the second optical signal indirectly via the reflector
Implementation Method 3
the moving unit includes a pneumatic operator to effect linear motion using first compressed air
Implementation Method 4
a sensor cleaner connected to the driver to automatically remove the foreign matter when the moving plate moves
Data Source
AI summary
A load port module includes a plate to support at least one substrate, a sensor to detect foreign matter at a predetermined location, and a cleaner to remove the foreign matter at the predetermined location when the foreign matter is detected by the sensor. The cleaner removes the foreign matter at the predetermined location in synchronism with movement of the plate. A mover to move the plate continues to operate after detection of the foreign matter by the sensor and removal of the foreign matter by the cleaner.