Load Port Sensor Displacement for Compact Transport Space
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Solution Overview
Problem
Existing load ports require extra space for sensor protrusion when the port door is in a retreated position, which interferes with the transport space and increases the size of the load port.
Innovation Solution
A load port design with a displacing unit that moves the substrate detecting unit in a direction opposite to the port door during its advancing and retreating operations, reducing the sensor's intrusion into the transport space and minimizing the load port's overall size.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the port door is moved to a retreated position to open the container, then the container door can be opened, but the mapping sensors protrude further into the transport space requiring extra space
Solution Approach 1:
The mapping sensors are made movable relative to the port door through a displacement mechanism. When the port door retreats, the displacement mechanism causes the mapping sensors to move in the opposite direction (forward), maintaining a compact profile and minimizing protrusion into the transport space while still enabling container opening operations
Solution Approach 2:
The sensor assembly is separated from the port door structure and mounted on an independent displacement mechanism. This segmentation allows the sensors to be independently positioned and displaced relative to the port door, enabling the sensors to move in opposition to the door movement and reduce overall protrusion
2Measurement precision
If the mapping sensors are positioned to detect substrates when the port door is closed, then substrate detection is enabled, but the sensors must protrude forward reducing the available transport space
Solution Approach 1:
The mapping sensors transition from a static protruding position to a dynamic position that adjusts with port door movement. The displacement mechanism ensures sensors maintain optimal detection positioning relative to the container while minimizing intrusion into the transport space when the door is in retreated position
Solution Approach 2:
The displacement mechanism is pre-configured to automatically position the mapping sensors in the optimal detection location before the port door begins its retreat movement. This preliminary positioning ensures substrate detection can occur without requiring excessive sensor protrusion into the transport space
Data Source
AI summary
A load port includes a placing table on which a container for a substrate; a port plate including an opening portion; a port door configured to be capable of opening and closing the opening portion and holding a door portion of the container; a substrate detecting unit provided in the port door and configured to detect the substrate in the container; a lifting and lowering unit configured to lift and lower the port door; an advancing and retreating unit configured to advance and retreat the port door in an advancing and retreating direction; and a displacing unit configured to displace the substrate detecting unit in the advancing and retreating direction. The displacing unit displaces the substrate detecting unit in a direction opposite to the port door during an advancing and retreating operation of the port door by the advancing and retreating unit.