Load Port Imaging for Substrate Warpage and Alignment Checks
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Solution Overview
Problem
Existing load port modules require multiple instruments and consume significant time to accurately acquire mapping, alignment, and warpage information of substrates in storage containers.
Innovation Solution
A load port module equipped with a mounting table, door opener, and image generator that generates images of substrates at different angles, allowing a controller to determine warpage and alignment, and map substrate positions efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple instruments are used to acquire mapping, alignment, and warpage information, then measurement precision is improved, but device complexity increases and time consumption increases
Solution Approach 1:
The patent combines multiple measurement functions (mapping, alignment, and warpage detection) into a single imaging device. The imaging device captures images at different angles and positions, and the controller processes these images to extract all three types of substrate information, eliminating the need for multiple separate instruments while maintaining comprehensive measurement capability
Solution Approach 2:
The imaging device is designed to perform multiple functions: it can acquire mapping information by determining substrate position, alignment information by detecting substrate orientation, and warpage information by analyzing substrate surface curvature. This multi-functional approach replaces multiple specialized instruments with a single versatile device
2Measurement precision
If multiple instruments are used to acquire substrate information, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The imaging device is positioned on the door opener before the door opening process begins. As the door opener moves to open the door, the imaging device automatically captures substrate images at various positions and angles during the motion sequence, acquiring all necessary measurement data in advance without requiring separate measurement steps after door opening
Solution Approach 2:
The imaging device continuously captures substrate images throughout the door opening motion sequence. By taking images at multiple positions (initial position, intermediate positions, and final position) and angles during the continuous door opening process, the system accumulates all necessary measurement data in a single continuous operation rather than requiring discrete measurement steps
3Device complexity
If a single imaging device is used to acquire all substrate information, then device complexity is reduced, but measurement precision may deteriorate
Solution Approach 1:
The imaging device acquires three-dimensional warpage information by capturing images from multiple angles and positions. The controller processes these multi-dimensional image data to calculate substrate surface curvature, transforming two-dimensional image captures into three-dimensional warpage measurements, thereby maintaining high measurement precision with a single device
Solution Approach 2:
The system replaces complex mechanical measurement systems with optical imaging and computational analysis. The controller uses image processing algorithms to extract precise substrate information (position, orientation, and warpage) from captured images, substituting mechanical measurement instruments with an optical-computational approach that achieves comparable or superior precision
4Measurement precision
If images are captured at multiple angles and positions, then measurement precision is improved, but loss of time increases
Solution Approach 1:
The imaging device is pre-positioned on the door opener before door opening begins. The system plans the imaging sequence in advance, capturing images at specific positions and angles during the door opening motion, thereby acquiring all necessary measurement data proactively without requiring additional time after the door is opened
Solution Approach 2:
The imaging device captures images at periodic intervals during the door opening motion sequence. By taking images at regular positional intervals (initial position, intermediate positions, and final position) as the door opener moves, the system efficiently collects all necessary multi-angle data within the existing door opening time frame
Data Source
AI summary
A load port module includes: a mounting table configured to receive a container, wherein the container is configured to receive a substrate therein; a door opener is configured to open and close a door of the container; an image generator is on the door opener, and the image generator is configured to generate a first image of the substrate at a first angle with respect to the substrate, and a second image of the substrate at a second angle with respect to the substrate different from the first angle; and a controller is configured to determine warpage of the substrate based on the first image and to determine alignment of the substrate based on the second image.