Load Sensor Element Temperature Compensation via Segmented Resistance
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Solution Overview
Problem
Existing pressure sensors face challenges in achieving accurate temperature compensation due to deformation of the sensor element, which affects the output of the adjustment resistance body.
Innovation Solution
A load sensor element is designed with an inorganic layer for pressure reception, a thin-film resistance body, and two temperature-compensation resistance bodies on opposite surfaces of the substrate. These resistance bodies exhibit opposite changes in resistance value when the substrate deforms, allowing for cancellation of deformation-induced changes and isolation of temperature-dependent changes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an adjustment resistance body is provided on the pressure sensor element to perform temperature compensation, then temperature compensation is enabled, but the output from the adjustment resistance body is affected by deformation of the pressure sensor element, deteriorating temperature correction accuracy
Solution Approach 1:
The pressure sensor element is divided into distinct functional regions: a pressure receiving portion that deforms under load and a non-strain portion that remains stable. The adjustment resistance body is specifically placed on the non-strain portion, separating the temperature compensation function from the deformation zone, thereby eliminating the harmful interaction between deformation and resistance output.
2Measurement precision
If the pressure sensor element is designed to deform as a whole when load is applied, then pressure measurement is enabled, but the deformation affects the output of temperature compensation resistance bodies
Solution Approach 1:
Different regions of the pressure sensor element are assigned different functional qualities: the pressure receiving portion is designed to deform for pressure sensing, while the non-strain portion is designed to remain dimensionally stable for housing the adjustment resistance body. This local differentiation ensures that temperature compensation is not compromised by overall element deformation.
3Device complexity
If a single resistance body is used for both pressure sensing and temperature compensation, then device complexity is reduced, but the accuracy of temperature compensation deteriorates due to deformation effects
Solution Approach 1:
The sensing function is segmented into a pressure-sensitive resistance body on the pressure receiving portion and an adjustment resistance body on the non-strain portion. This segmentation allows each resistance body to perform its specific function independently, with the adjustment resistance body providing accurate temperature compensation without being affected by pressure-induced deformation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration improves the accuracy of temperature compensation by mitigating the influence of substrate deformation on resistance value changes, enabling more precise measurement of surface pressure loads.
Implementation Method 1
a thin-film resistance body formed of a resistance body whose resistance value is changed in response to the load received by the inorganic layer
Implementation Method 2
when the substrate is deformed by the load received by the inorganic layer, the changes in the resistance values are caused in opposite polarities to each other
Data Source
AI summary
A load sensor element includes a substrate and an inorganic layer having a pressure receiving surface configured to receive a load, the inorganic layer being provided so as to cover a part of a front surface that is a first surface of the substrate. The load sensor element includes a thin-film resistance body formed by a resistance body whose resistance value is changed in response to the load received by the inorganic layer. The thin-film resistance body has: a main body portion sandwiched between the substrate and the inorganic layer, and a first end portion and a second end portion that are both end portions mounted on an exposed portion of the substrate that is not covered by the inorganic layer. The load sensor element includes a first temperature-compensation resistance body independent from the thin-film resistance body, the first temperature-compensation resistance body being arranged on the exposed portion of the front surface that is the first surface of the substrate. The load sensor element includes a second temperature-compensation resistance body arranged on a back surface that is a second surface of the substrate, the second temperature-compensation resistance body being configured to exhibit the same behavior as the first temperature-compensation resistance body.