Locking Ring Bonding Layout for Probe Card Thermal Expansion
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Solution Overview
Problem
Conventional adhesives used in probe cards fail to provide adequate durability in high-temperature environments, leading to cracking or separation of the bonded interface between ceramic probe substrates and metal locking ring members due to differences in thermal expansion coefficients.
Innovation Solution
A locking ring member with a plate shape and outward projections, using high-temperature-resistant, high-strength adhesive applied at discrete points to bond with the ceramic probe substrate, minimizing the impact of thermal expansion differences.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If a high-temperature resistant, high-strength adhesive is applied to the entire periphery of the locking ring member to bond it to the ceramic probe substrate, then the bonding strength is improved, but the probe substrate develops cracks due to difference in coefficients of thermal expansion between ceramic and metal in high-temperature environments
Solution Approach 1:
The continuous adhesive bonding at the entire periphery is segmented into discrete adhesive application points. The locking ring member has adhesive application recesses at specific locations where adhesive is applied only at these discrete points rather than continuously around the entire periphery, reducing thermal expansion stress while maintaining bonding strength
Solution Approach 2:
The adhesive bonding is applied locally at specific recesses rather than uniformly across the entire interface. This localized bonding approach concentrates the bonding function at specific points while leaving other areas free to accommodate thermal expansion differences between the metal locking ring and ceramic probe substrate
2Ease of manufacture
If a general-purpose elastic adhesive is used to bond the locking ring member to the probe substrate, then the ease of manufacture is improved, but the durability in high-temperature environments deteriorates as the adhesive cracks or the bonded interface separates
Solution Approach 1:
The adhesive properties are changed to accommodate high-temperature environments. A high-temperature resistant adhesive with appropriate viscosity and curing characteristics is selected, and the adhesive application is optimized through recess design to ensure proper bonding while maintaining durability at elevated temperatures
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents damage to ceramic probe substrates and metal locking ring members in high-temperature environments by reducing stress from thermal expansion, enhancing bonding durability and service life.
Implementation Method 1
An adhesive applied at a plurality of points separately from each other bonds the one surface facing the probe substrate of the ring shape part included in the locking ring member to one surface of the probe substrate
Implementation Method 2
the probe substrate develops cracks (fissures) due to a difference in coefficients of thermal expansion between the material of the probe substrate and the material (metal) of the locking ring member
Data Source
AI summary
A plate-shaped locking ring member is used to mount a probe substrate on a top plate of a prober included in a test apparatus used to test a device under test. The locking ring member includes a ring shape part, and projection portions protruding outward from a peripheral edge part of the ring shape part, arranged apart from each other along the peripheral edge part. The ring shape part included in the locking ring member has one surface facing the probe substrate, and another surface opposite to the one surface. An adhesive applied at a plurality of points separately from each other bonds the one surface facing the probe substrate of the ring shape part included in the locking ring member to one surface of the probe substrate. The locking ring member has a concave portion in each of a plurality of points subjected to application of the adhesive.