Semiconductor Logic Leakage Detection via Voltage Sequencing

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Solution Overview

Problem

Current semiconductor devices face challenges in detecting tiny current leakage, particularly in the logic area, which can be caused by manufacturing imperfections such as FIN structure or poly residue, leading to reliability concerns if not screened before shipment.

Innovation Solution

A testing apparatus and method involving a power supply device and data generating device that provide alternating voltages and data sequences to a semiconductor device under test, allowing for the detection of current leakage by comparing data before and after voltage reduction, enabling the identification of defects in logic units.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Measurement precision

If standard testing methods are used, then device functionality is verified, but tiny current leakage in logic area cannot be detected

Engineering Contradiction:
Improvecurrent leakage detection capabilityVSAvoiddetectability of tiny current leakage
Core Design Contradiction:
Measurement precisionVSDifficulty of detecting and measuring

Solution Approach 1:

The patent applies preliminary action by first writing test data to the logic units before reducing power. This prepares the device in a known state with stored data that can later be read to detect leakage. The sequence of writing data first, then reducing power, allows the leakage detection to compare against a known good state, enabling detection of tiny current leakage that would be invisible in normal operation.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent changes the power parameter by reducing it to a low level after writing test data. This parameter change creates conditions where tiny current leakage becomes detectable through subsequent read operations. By controlling the power state transition and timing, the method enables leakage detection that cannot be achieved under normal operating conditions.

Inventive Principle:
Principle #35Parameter changes

2Measurement precision

If power is reduced to detect leakage, then tiny current leakage becomes detectable, but data in logic units may be lost

Engineering Contradiction:
Improvecurrent leakage detection capabilityVSAvoiddata retention in logic units
Core Design Contradiction:
Measurement precisionVSReliability

Solution Approach 1:

The patent performs preliminary data writing to logic units before reducing power. This establishes a known data state that serves as a reference for later comparison. By having the data written first, the system can detect leakage by comparing the read-back data against the originally written data, ensuring reliability through verification rather than blind assumption.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent implements feedback by reading back the data from logic units after power reduction and comparing it with the originally written data. This feedback loop provides verification that data was retained during the low-power interval, or identifies leakage by detecting data corruption. The comparison mechanism provides definitive feedback on whether leakage occurred, resolving the reliability concern.

Inventive Principle:
Principle #23Feedback

3Measurement precision

If alternating voltage sequences are applied, then leakage detection capability is improved, but testing time increases

Engineering Contradiction:
Improveleakage detection accuracyVSAvoidtesting duration
Core Design Contradiction:
Measurement precisionVSLoss of time

Solution Approach 1:

The patent applies partial action by using simplified test patterns and targeted testing sequences rather than exhaustive testing. The alternating voltage sequences focus specifically on detecting leakage through critical read/write operations rather than testing all possible states. This partial approach achieves adequate leakage detection capability while limiting the time penalty to what is necessary for the essential detection function.

Inventive Principle:
Principle #16Partial or excessive action

Data Source

PatentUS11675004B2Method and apparatus for detecting defective logic devices
Publication Date: 2023.06.13 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD
  • US11675004B2 patent drawing
  • US11675004B2 patent drawing
  • US11675004B2 patent drawing

AI summary

An apparatus for testing a device under test (DUT) is provided. The apparatus includes a power supply device and a data generating device. The power supply device is configured to provide a first voltage and a second voltage to the DUT. The data generating device is configured to provide first data to the DUT. The power supply device is configured to provide the first voltage to the DUT in a first time duration. The data generating device is configured to provide the first data to the DUT in the first time duration. The power supply device is configured to provide the second voltage to the DUT in a second time duration after the first time duration. The second voltage is different from the first voltage.